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Mems patents



      
           
This page is updated frequently with new Mems-related patent applications. Subscribe to the Mems RSS feed to automatically get the update: related Mems RSS feeds. RSS updates for this page: Mems RSS RSS


Directional mems microphone and receiver device

Shandong Gettop Acoustic

Directional mems microphone and receiver device

Wavelength-selective cross-connect device having a variable number of common ports

Alcatel-lucent Usa

Wavelength-selective cross-connect device having a variable number of common ports

Wavelength-selective cross-connect device having a variable number of common ports

Cambridge Silicon Radio Limited

Apparatus for wirelessly charging a rechargeable battery

Date/App# patent app List of recent Mems-related patents
06/25/15
20150181352
 Biasing circuitry for mems transducers patent thumbnailBiasing circuitry for mems transducers
Circuitry for biasing a mems transducer and associated signal processing circuitry. A reference voltage generator is configured to generate a reference voltage at a reference voltage node.
Cirrus Logic International (uk) Limited
06/25/15
20150181346
 Directional mems microphone and receiver device patent thumbnailDirectional mems microphone and receiver device
The present invention provides a directional mems microphone and a receiver device wherein mems microphone comprises a microphone cover, a printed circuit board (pcb), a application specific integrated circuit (asic) chip, a mems die, a diaphragm, a damping, a metal wire(s), at least two internal acoustic ports and at least two external acoustic ports corresponding to the internal acoustic ports. The microphone further comprises a tuning cavity which includes a first tuning cavity by which a first internal acoustic port is communicated with a first external acoustic port, or by which a second internal acoustic port is communicated with a second external acoustic port.
Shandong Gettop Acoustic Co., Ltd.
06/25/15
20150180603
 Wavelength-selective cross-connect device having a variable number of common ports patent thumbnailWavelength-selective cross-connect device having a variable number of common ports
A configurable wavelength-selective cross-connect (wsxc) device having an array of optical ports in which at least some of the ports are configurable to operate as common ports or as plural ports. The configurable wsxc device includes a mems mirror array whose mirrors are tiltable in a manner that enables, e.g., reconfigurations of the configurable wsxc device that result in a change of the number of common ports therein.
Alcatel-lucent Usa Inc.
06/25/15
20150180251
 Apparatus for wirelessly charging a rechargeable battery patent thumbnailApparatus for wirelessly charging a rechargeable battery
The present application relates to apparatus for wirelessly charging a rechargeable battery, the apparatus comprising: a charging resonator assembly for converting energy from a magnetic field external to the apparatus into an electric current; and a charging circuit for charging the battery using the electric current, wherein the charging resonator assembly includes a plurality of microelectromechanical system (mems) switches which, when open, divide the charging resonator into a plurality of electrically unconnected resonator portions, and which, when closed, connect the plurality of resonator portions to form a continuous resonator.. .
Cambridge Silicon Radio Limited
06/25/15
20150179378
 Rf mems based large scale cross point electrical switch patent thumbnailRf mems based large scale cross point electrical switch
This disclosure provides systems, methods, and apparatus for providing a crosspoint switch used in an optical fiber data network. The crosspoint switch can switch optical signals received from any of a plurality of input optical fibers to any one of a plurality of output optical fibers.
Google Inc.
06/25/15
20150177775
 Digital sample clock generator, a vibration gyroscope circuitry comprising such digital sample clock generator, an associated apparatus, an associated semiconductor device and associated methods patent thumbnailDigital sample clock generator, a vibration gyroscope circuitry comprising such digital sample clock generator, an associated apparatus, an associated semiconductor device and associated methods
A digital sample clock generator for generating a sample clock signal from an input signal derived from a drive measurement voltage signal of a vibrating mems gyroscope is provided.. .
Freescale Semiconductor, Inc.
06/25/15
20150177273
 Motion sensor  forming the same patent thumbnailMotion sensor forming the same
A micro-electro-mechanical system (mems) device includes a sensing element, and a proof mass over and overlapping at least a portion of the sensing element. The proof mass is configured to be movable toward the sensing element.
Taiwan Semiconductor Manufacturing Company, Ltd.
06/25/15
20150177272
 Microelectromechanical system and methods of use patent thumbnailMicroelectromechanical system and methods of use
Methods of measuring displacement of a movable mass in a microelectromechanical system (mems) include driving the mass against two displacement-stopping surfaces and measuring corresponding differential capacitances of sensing capacitors such as combs. A mems device having displacement-stopping surfaces is described.
Purdue Research Foundation
06/25/15
20150177171
 Gas sensor package patent thumbnailGas sensor package
There is provided a gas sensor package including: a lead frame; a readout integrated circuit device mounted on the lead frame; a gas sensor attached to one surface of the readout integrated circuit device; a micro electro mechanical system (mems) cap including an internal space receiving the gas sensor and attached to one surface of the readout integrated circuit device; and a mold part covering the lead frame, the readout integrated circuit device, and the mems cap, wherein an upper surface of the mems cap and an upper surface of the mold part are formed on the same plane.. .
Samsung Electro-mechanics Co., Ltd.
06/25/15
20150177122
 Cell sorting system using electromagnetic solenoid patent thumbnailCell sorting system using electromagnetic solenoid
A mems-based cell sorting system is disclosed, which uses a novel combination of features to accomplish the cell sorting in the microfabricated channels housed in a disposable cartridge. The mems-based cell sorting system may include a microfabricated cell sorting valve that is responsive to an applied magnetic field.
Owl Biomedical, Inc.
06/25/15
20150176993

Mems sensor module and mems sensor package module


Embodiments of the invention provide a micro electro mechanical system (mems) sensor module, including a sensor, a substrate connected to the sensor, and an external board connected to the substrate by a conductive connector. The substrate is provided with a cavity so as to be opposite to the sensor..
Samsung Electro-mechanics Co., Ltd.
06/25/15
20150176992

Electronic circuit for measuring rotational speed in a mems gyroscope and actuating the circuit


The electronic circuit measures angular speed in a gyroscope, which includes a mass connected to a spring and a damping element, an actuation capacitor for actuating the mass and a detection capacitor for detecting motion of the mass. The electronic circuit includes a measurement resistor, which is connected to the moving mass and has a variation in resistive value equal to the oscillation frequency of the mass.
Em Microelectronic-marin Sa
06/25/15
20150176977

Methods and devices for determining position or distance


A method for detecting the positioning of an entity, comprising the steps of (a) using a projector, which comprises a laser and a mems micro mirror arranged to receive light from the laser and which can oscillate about at least one oscillation axis, to project light towards the entity to project an image which is composed of pixels onto the entity, wherein the image has a first density of pixels; (b) changing the density of pixels in the projected image; (c) sensing at least a portion of light of the projected image which is reflected from the entity; and (d) using the sensed portion of light to determine the position of the entity. There is also provided a corresponding device for detecting position.
Lemoptix Sa
06/25/15
20150175869

Use of mems in set-delayed cement compositions comprising pumice


Disclosed is a method of cementing. The method comprises providing a set-delayed cement composition comprising water, pumice, hydrated lime, a set retarder, and a micro-electrical-mechanical system; and allowing the set-delayed cement composition to set..
Halliburton Energy Services, Inc.
06/25/15
20150175408

Method for thin film encapsulation (tfe) of a microelectromechanical system (mems) device and the mems device encapsulated thereof


A method for thin film encapsulation (tfe) of a microelectromechanical system (mems) device, including providing a substrate; forming a mems device on the substrate; forming one or more etching channels adjacent to the mems device; providing one or more cavities below the mems device; and forming one or more cavities above the mems device.. .
Agency For Science, Technology And Research
06/25/15
20150175407

Micro electromechanical system sensor and forming the same


A micro electromechanical system (mems) device includes a mems section attached to a substrate, and a cap bonded to a first surface of the substrate. The mems device further includes a carrier bonded to a second surface of the substrate opposite the first surface, wherein the carrier is free of active devices, and the cap and the carrier define a vacuum region surrounding the mems section.
Taiwan Semiconductor Manufacturing Company, Ltd.
06/25/15
20150175406

Semiconductor device and manufacturing


A semiconductor device includes a device substrate and a conductive capping substrate. The device substrate includes at least one micro-electro mechanical system (mems) device.
Taiwan Semiconductor Manufacturing Company, Ltd.
06/25/15
20150175405

Mechanisms for forming micro-electro mechanical system device


Structures and formation methods of a micro-electro mechanical system (mems) device are provided. The mems device includes a substrate and a mems structure over the substrate, and the mems structure has a movable element.
Taiwan Semiconductor Manufacturing Co., Ltd.
06/25/15
20150175404

Mems device and process


A mems capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes.
Cirrus Logic International (uk) Limited
06/25/15
20150173419

Electronic cigarette with thermal flow sensor based controller


An electronic cigarette with a thermal flow sensor based controller is provided which comprises a housing; a battery, a controller assembly; an air inlet for allowing air to enter into the housing, a mouthpiece; a fluid reservoir; an atomizer; at least a light emitting diode; and a display. The thermal flow sensor is fabricated using micro-electro-mechanical systems (mems) technologies which is amenable to create the electronic cigarette with a thermal flow sensor based controller having stable evaporated liquid delivering, immediately response to smoker inhalation, like normal cigarette inhalation resistance, low power consumption, and no any accident actuation take place..
06/18/15
20150171597

Wavelength sweepable laser source


Wavelength sweepable laser source is disclosed, wherein the laser source is a semiconductor laser source adapted for generating laser light at a lasing wavelength. The laser source comprises a substrate, a first reflector, and a second reflector.
Danmarks Tekniske Universitet
06/18/15
20150170997

Mems device and manufacturing the same


According to one embodiment, a mems device is disclosed. The device includes a substrate, a mems element provided on the substrate, a first film having a plurality of first through holes.
Kabushiki Kaisha Toshiba
06/18/15
20150168714

Mems device


According to the present invention there is provided a mems device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.. .
Lemoptix Sa
06/18/15
20150168442

Optomechanical inertial sensor


Embodiments of the present disclosure are directed towards techniques and configurations for mems sensing device configured to determine inertial change applied to the device. In one instance, the device may comprise a laser arrangement configured to generate a light beam, and a waveguide configured to split the light beam into two portions.
Intel Corporation
06/18/15
20150168441

Optomechanical sensor for accelerometry and gyroscopy


Embodiments of the present disclosure are directed towards techniques and configurations for a mems device configured to determine inertial change applied to the device. In one instance, the device may comprise a laser arrangement configured to generate a light beam having a resonant wavelength, a waveguide configured to receive and output the light beam, and an optical resonator comprising a deformable closed loop and optically coupled to the waveguide to receive a portion of the light beam.
Intel Corporation
06/18/15
20150168221

Black silicon-based high-performance mems thermopile ir detector and fabrication method


This invention involves structure and fabrication method of a black silicon-based mems thermopile ir detector. The high-performance black silicon-based mems thermopile ir detector includes a substrate; a releasing barrier band on the substrate; a thermal isolation cavity constructed by the releasing barrier band; a black silicon-based ir absorber located right above the thermal isolation cavity; a number of thermocouples are set around the lateral sides of the black silicon-based ir absorber.
Jiangsu R&d Center For Internet Of Things
06/18/15
20150168215

Raman spectroscopy using diffractive mems


A raman spectrometer including a laser excitation source, edge filters, and detection optics that direct light into a spectrograph. A spectrograph containing a dispersive element and optics that directs various wavelengths of light onto a segmented diffractive mems light modulator array.
Thermo Scientific Portable Analytical Instruments Inc.
06/18/15
20150166335

Mems package and a manufacturing the same


A plurality of mems transducer packages is manufactured by placement of a plurality of transducers onto a panel of undivided package substrates, attachment of a plurality of individual covers onto a panel and over the transducers, depositing an epoxy into the channels between the covers, and then singulating the panel into individual mems transducer packages.. .
Knowles Electronic Llc
06/18/15
20150166334

Mems device with release aperture


The present disclosure provides a micro-electro-mechanical systems (mems) device. In an embodiment, a device includes a substrate; a mems structure disposed above a sacrificial layer opening above the substrate; a release aperture disposed at substantially a same level above the sacrificial layer opening as the mems structure; a first cap over the mems structure and the sacrificial layer opening, a leg of the first cap disposed between the mems structure and the release aperture; and a second cap plugging the release aperture..
Taiwan Semiconductor Manufacturing Company, Ltd.
06/18/15
20150166333

Mems encapsulation by multilayer film lamination


This disclosure provides systems, methods and apparatus for a laminated film enclosing an array of microelectromechanical systems (mems) structures. In one aspect, a mems apparatus includes a substrate having a device region and an edge region surrounding the device region and an array of mems structures on the substrate at the device region.
Qualcomm Mems Technologies, Inc.
06/18/15
20150166332

Nems control device having a digital delay module


A programmable delay module (170) for inducing a given delay selected from a plurality of predetermined delays to said given digital signal and delivering one or more delayed digital signals according to said given delay to excitation means of the mems or nems.. .
06/18/15
20150166330

Method and structure of mems wlcsp fabrication


A method for fabricating a mems-ic device structure can include receiving a cmos substrate comprising a plurality of cmos circuits and a surface portion. A mems substrate having at least one mems device can be received and coupled to the cmos substrate.
Mcube Inc.
06/18/15
20150166328

Wafer level package of mems sensor and manufacturing the same


A mems sensor and a manufacturing method thereof is provided: forming a lower electrode layer wherein a metal is deposited on a portion of a lower glass substrate; forming a structural layer by etching according to a pattern which is formed on an upper surface of a silicon wafer and then further etching to the same thickness as the metal which is formed on a portion of the lower electrode layer; anodic bonding the structural layer to an upper portion of the lower electrode layer formed; forming a sensing part in the structural layer by etching according to a pattern which is formed on an opposite surface of the structural layer which is not etched; and forming an upper electrode layer by depositing a metal on an upper wafer and eutectic bonding the upper electrode layer to the structural layer on which the sensing part is formed.. .
Hyundai Motor Company
06/18/15
20150164380

System and measuring respiration with accelerometers


The respiration rate of a patient may be measured by sensing respiration motion using two mems devices, and by processing a respiration signal produced by processing the outputs of the two mems devices. Some embodiments dispose two accelerometers around a patient's abdomen and determine respiratory motion from the difference between the outputs of the two accelerometers.
Analog Devices Global
06/11/15
20150160089

Pressure sensor with built-in calibration capability


A mems pressure sensor (70) includes a sense cell (80), a test cell (82), and a seal structure (84). The test cell includes a test cavity (104), and the seal structure (84) is in communication with the test cavity, wherein the seal structure is configured to be breached to change an initial cavity pressure (51) within the test cavity (104) to ambient pressure (26).
Freescale Semiconductor, Inc.
06/11/15
20150159292

Apparatus and methods for uniformly forming porous semiconductor on a substrate


This disclosure enables high-productivity controlled fabrication of uniform porous semiconductor layers (made of single layer or multi-layer porous semiconductors such as porous silicon, comprising single porosity or multi-porosity layers). Some applications include fabrication of mems separation and sacrificial layers for die detachment and mems device fabrication, membrane formation and shallow trench isolation (sti) porous silicon (using porous silicon formation with an optimal porosity and its subsequent oxidation).
Solexel, Inc.
06/11/15
20150158723

Mems devices and methods of forming same


A microelectromechanical system (mems) device may include a mems structure over a first substrate. The mems structure comprises a movable element.
Taiwan Semiconductor Manufacturing Company, Ltd.
06/11/15
20150158722

Systems and apparatus having mems acoustic sensors and other mems sensors and methods of fabrication of the same


A micro electro-mechanical system (mems) device is provided. The mems device includes: a substrate having a first surface and a second surface and wherein the first surface is exposed to an environment outside the mems device; and a mems microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the mems microphone are incident on the diaphragm.
Invensense, Inc.
06/11/15
20150158721

Mems device with sealed cavity and release chamber and related double release method


Disclosed is a mems device having lower, upper and release chambers with a similar pressure and/or a similar gaseous chemistry. The mems device includes a top mems plate and a bottom mems plate.
Newport Fab, Llc Dba Jazz Semiconductor
06/11/15
20150158720

Integrated heater for gettering or outgassing activation


A microelectromechanical systems (mems) structure with integrated heater is disclosed. The mems structure with integrated heater comprises a first substrate with cavities, bonded to a second substrate, forming a plurality of sealed enclosures of at least two types.
Invensense, Inc.
06/11/15
20150158719

Mems device with sealed cavity and fabricating same


Disclosed is a mems device having lower and upper chambers with a similar pressure and/or a similar gaseous chemistry. The mems device includes a top mems plate and a bottom mems plate.
Newport Fab, Llc Dba Jazz Semiconductor
06/11/15
20150158718

Hybridly integrated module having a sealing structure


A hybridly integrated component includes an asic element having circuit functions which are integrated into the asic substrate; a layer structure on the asic substrate which includes at least one wiring level; a mems element including at least one micromechanical structure component which extends over the entire thickness of the mems substrate; and a cap wafer. The mems element is mounted on the asic layer structure.
Robert Bosch Gmbh
06/11/15
20150158716

Mechanism for forming mems device


Embodiments of mechanisms for forming a micro-electro mechanical system (mems) device are provided. The mems device includes a substrate and a mems substrate disposed on the substrate.
Taiwan Semiconductor Manufacturing Co., Ltd
06/04/15
20150156591

Mems microphone element and device including such an mems microphone element


A capacitive mems microphone element is described which may be used optionally for detecting acoustic signals (microphone mode) or for detecting ultrasound signals in a defined frequency range (ultrasound mode). In the layered structure of the mems microphone element, at least two carrier elements for the two electrode sides of a capacitor system are formed one above the other and at a distance from one another for signal detection.
Robert Bosch Gmbh
06/04/15
20150154923

Display device equipped with power generation function


An mems shutter-type display device equipped with a power generation function, which achieves reduction of power consumption, is provided in the present invention. The display device equipped with a power generation function according to the present invention includes: a first substrate including a movable first shutter with a first slit, a first electrode, and a second electrode that is installed on the side opposite to the first electrode via the first shutter; a second substrate including a second shutter with a second slit; a drive circuit to actuate the first shutter; the first shutter being positively or negatively charged; and the drive circuit being connected to the first electrode..
Sharp Kabushiki Kaisha
06/04/15
20150153563

Wavelength tunable mems-fabry perot filter


A wavelength tunable gain medium with the use of micro-electromechanical system (mems) based fabry-perot (fp) filter cavity tuning is provided as a tunable laser. The system comprises a laser cavity and a filter cavity for wavelength selection.
Inphenix, Inc.
06/04/15
20150153378

Micro electro mechanical systems sensor module package and manufacturing the same


Disclosed herein is a micro electro mechanical systems (mems) sensor module package. The mems sensor module package includes: an mems sensor; a base part formed so as to encapsulate the mems sensor with a resin; an external terminal provided on one surface of the base part; a through mold via (tmv) provided in the base part to electrically connect the external terminal and the mems sensor to each other; and an application specific integrated circuit (asic) stacked on the mems sensor.
Samsung Electro-mechanics Co., Ltd.
06/04/15
20150153372

Micro electro mechanical systems sensor module package and manufacturing the same


Disclosed herein is a mems sensor module package. The mems sensor module package according to a preferred embodiment of the present invention includes: a printed circuit board (pcb); an application specific integrated circuit (asic) stacked on the pcb, one side of the asic being wire-bonded to the pcb; a mems sensor stacked on the asic; and a molding encapsulating the mems sensor and the asic with a resin.
Samsung Electro-mechanics Co., Ltd.
06/04/15
20150151961

Lateral etch stop for nems release etch for high density nems/cmos monolithic integration


Structure and method for fabricating a barrier layer that separates an electromechanical device and a cmos device on a substrate. An example structure includes a protective layer encapsulating the electromechanical device, where the barrier layer may withstand an etch process capable of removing the protective layer, but not the barrier layer.
International Business Machines Corporation
06/04/15
20150151960

Sensor probe and related systems and methods


The invention provides a sensor probe which has: one or more microelectromechanical systems (mems) sensors configured to sense one or more parameters and a communication bus in electrical communication therewith. The one or more sensors and communication bus are disposed on a substrate.
06/04/15
20150151958

Mems chip and manufacturing method therefor


A mems chip (100) includes a silicon substrate layer (110), a first oxidation layer (120) and a first thin film layer (130). The silicon substrate layer includes a front surface (112) for a mems process and a rear surface (114), both the front surface and the rear surface being polished surfaces.
Csm Technologies Fab1 Co., Ltd.
05/28/15
20150147841

Method to release diaphragm in mems device


A method for releasing a diaphragm of a micro-electro-mechanical systems (mems) device at a stage of semi-finished product. The method includes pre-wetting the mems device in a pre-wetting solution to at least pre-wet a sidewall surface of a cavity of the mems device.
Solid State System Co., Ltd.
05/28/15
20150146888

Mems microphone package and manufacturing the same


There is provided a micro electro mechanical system (mems) microphone package including: an mems microphone chip having an internal space formed therein; a substrate having the mems microphone chip mounted thereon; an asic chip disposed in the internal space formed within the mems microphone chip; and a case bonded to the substrate and having an internal space formed therein in order to accommodate the mems microphone chip.. .
Samsung Electro-mechanics Co., Ltd.
05/28/15
20150146887

Microphone on printed circuit board (pcb)


A mems device includes a mem-cmos module having a cmos chip and a mems chip. The mems chip includes a port exposed to the environment.
Invensense, Inc.
05/28/15
20150146885

Systems and methods for providing a wideband frequency response


Electronic circuitry is described. The electronic circuitry includes a first microelectromechanical system (mems) structure that exhibits a first frequency response in a voice frequency range and that captures a first signal.
Qualcomm Incorporated
05/28/15
20150146312

Mems electrical contact systems and methods


A microelectromechanical systems (mems) device may be provided with one or more sintered electrical contacts. The mems device may be a mems actuator or a mems sensor.
Digitaloptics Corporation
05/28/15
20150145589

Capacitance processing circuit and a mems device


The claims define a processing circuit for processing input signals from a capacitive transducer structure. A current-to-voltage converter receives two input signals from the capacitive transducer structure, and outputs two output signals to gain stage circuits, and to a reference voltage generator.
Murata Manufacturing Co., Ltd.
05/28/15
20150145543

Mems device positioning apparatus, test system, and test method


A positioning apparatus includes a support structure, a positioning structure, and a fixture for retaining mems devices. A shaft spans between the support structure and the positioning structure, and is configured to rotate about a first axis relative to the support structure in order to rotate the positioning structure and the fixture about the first axis.
Freescale Semiconductor, Inc.
05/28/15
20150145076

Semiconductor package and manufacturing method thereof


There is provided a semiconductor package including: an application specific integrated circuit (asic) chip including a first bump ball and a second bump ball formed inwardly of the first bump ball; a micro electro mechanical system (mems) sensor electrically connected to the second bump ball; a lead frame electrically connected to the first bump ball and including a through hole formed therein; and a molded part covering the asic chip, the mems sensor, and the lead frame, wherein the asic chip is disposed above the lead frame.. .
Samsung Electro-mechanics Co., Ltd.
05/28/15
20150145075

Mems devices utilizing a thick metal layer of an interconnect metal film stack


A mems device, such as an accelerometer or gyroscope, fabricated in interconnect metallization compatible with a cmos microelectronic device. In embodiments, a proof mass has a first body region utilizing a thick metal layer that is separated from a thin metal layer.
05/28/15
20150145074

Mems device


A mems device includes a fixed electrode and a movable electrode arranged isolated and spaced from the fixed electrode by a distance. The movable electrode is suspended against the fixed electrode by one or more spacers including an insulating material, wherein the movable electrode is laterally affixed to the one or more spacers..
Infineon Technologies Ag


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Mems topics: Camera Module, Acceleration Sensor, Microelectromechanical Systems, Control Unit, Semiconductor Substrate, Semiconductor, Demodulation, Accelerometer, Calibration, Modulation, Mems Devices

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