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Mems

Mems-related patent applications - as published by the U.S. Patent and Trademark Office (USPTO).


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Transducer package with through-vias
Knowles Electronics, Llc
January 11, 2018 - N°20180014099

A microphone includes a microelectromechanical system (mems) die configured to sense an acoustic signal, a base, and a lid. The base has a top surface and a bottom surface. The bottom surface includes a first electrical pad and a second electrical pad. The first electrical pad and the second electrical pad are configured to transmit an electrical signal indicative of ...
Mems component having a high integration density
Epcos Ag
January 11, 2018 - N°20180013055

A mems component having increased integration density and a method for manufacturing such a component are specified. The component comprises a base wafer and a cover wafer arranged over this. A first cavity is arranged between the base wafer and the cover wafer. A second cavity is arranged over the cover wafer, below a thin-layer covering. The cavities contain component ...
Split signal differential mems microphone
Knowles Electronics, Llc
January 11, 2018 - N°20180012588

An integrated circuit includes a first amplifier and a second amplifier. A first impedance matching circuit is coupled to the first amplifier, a first charge pump, and a single mems transducer. A second impedance matching circuit is coupled to the second amplifier, a second charge pump, and to the single mems transducer. A first capacitive load as measured at an ...
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Acceleration sensor
B. G. Negev Technologies And Applications Ltd., At Ben-gurion University
January 11, 2018 - N°20180011125

The acceleration sensor is an mems capacitive acceleration sensor and has capacitive elements for signal detection and capacitive elements for servo control different from the capacitive elements for the signal detection. A voltage to generate force in a direction reverse to a detection signal of acceleration by the capacitive elements for the signal detection is applied to the capacitive elements ...
Mems optical device comprising a mems magnetic sensing mechansim and mems light absorbing structure
B. G. Negev Technologies And Applications Ltd., At Ben-gurion University
January 11, 2018 - N°20180010959

A mems optical device and an array composed thereof are disclosed herein, wherein the mems optical device comprises a light absorbing element, a deforming element, and a magnetic detector, wherein the magnetic detector comprises a magnetic source and a magnetic sensor.
Vibration and shock robust gyroscope
Freescale Semiconductor, Inc.
January 11, 2018 - N°20180010913

A mems device includes a movable mass having a central region overlying a sense electrode and an opening in which a suspension structure and spring system are located. The suspension structure includes an anchor coupled to a substrate and rigid links extending from opposing sides of the anchor. The spring system includes a first and second spring heads coupled to ...
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Planar cavity mems and related structures, methods of manufacture and design structures
International Business Machines Corporation
January 11, 2018 - N°20180009658

A method of forming a micro-electro-mechanical system (mems) includes forming a lower electrode on a first insulator layer within a cavity of the mems. The method further includes forming an upper electrode over another insulator material on top of the lower electrode which is at least partially in contact with the lower electrode. The forming of the lower electrode and ...
Use of a reactive, or reducing gas as a method to increase contact lifetime in ...
International Business Machines Corporation
January 11, 2018 - N°20180009657

A mems device comprises an electro mechanical element in a sealed chamber containing a gas comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of the device in a manner to maximize the electrical conductivity of the surfaces during operation of the device. The mems device may comprise a ...
Vent attachment system for micro-electromechanical systems
W. L. Gore & Associates, Inc.
January 11, 2018 - N°20180009655

A method of installing a vent to protect an open port of a micro-electrical mechanical system (mems) device, the vent being of the type comprising an environmental barrier membrane attached to a carrier and the vent further being attached to a liner, the method comprising the steps of: (a) feeding the vent to a die attach machine with die ejectors ...
Cmos-mems-cmos platform
Invensense, Inc.
January 11, 2018 - N°20180009654

A sensor chip includes a first substrate with a first surface and a second surface including at least one cmos circuit, a first mems substrate with a first surface and a second surface on opposing sides of the first mems substrate, a second substrate, a second mems substrate, and a third substrate including at least one cmos circuit. The first ...
Connection method for mems navigation unit for computer-assisted surgery
Orthosoft Inc.
January 11, 2018 - N°20180008354

A computer-assisted surgery (cas) navigation assembly comprises a micro-electromechanical sensor (mems) navigation unit having one or more mems to provide at least orientation data. A support receives the mems navigation unit therein, the support being adapted to be mounted on the instrument in a fixed orientation relative to established navigated features of the instrument. At least two mating ball-in-socket features ...
Mems devices and processes
Cirrus Logic International Semiconductor Ltd.
January 04, 2018 - N°20180007474

A mems transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter ...
Mems device and process
Cirrus Logic International Semiconductor Ltd.
January 04, 2018 - N°20180007473

The application describes mems transducers comprising a flexible membrane supported at a supporting edge relative to a substrate and further comprising one or more unbound edges. The shape of the unbound edge is selected so that the flexible membrane tends to bend along more than one bend axis in the region of the supporting edge.
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Side ported mems sensor device package and method of manufacturing thereof
Robert Bosch Gmbh
January 04, 2018 - N°20180005969

A mems sensor device package comprises a sensor assembly comprising a sensor device and a sensor circuit communicating coupled to the sensor device, the mems sensor device package further comprises an assembly package housing having a top member and a bottom member attached to the top member for encapsulating the sensor assembly. A passageway fluidly coupled the sensor device to ...
Fluid dispenser, fluid dispensation control device, and fluid dispensation abnormal status monitor
Richtek Technology Corporation
January 04, 2018 - N°20180004233

A fluid dispenser, includes: a fluid dispensation pipe, for receiving a fluid and controlling a dispensation the fluid; a mems sensor, for sensing a movement of the fluid dispenser, wherein when the movement is determined to be in an abnormal status, the mems sensor generates an alarm signal; and a dispensation stopper, for stopping the dispensation of the fluid according ...
Compensation and calibration of multiple mass mems sensor
Nxp Usa, Inc.
January 04, 2018 - N°20180003734

A system includes a mems sensor having dual proof masses capable of moving independently from one another in response to forces imposed upon the proof masses. Each proof mass includes an independent set of sense contacts configured to provide output signals corresponding to the physical displacement of the corresponding sense mass. A switch system is in communication with the sense ...
Mems microtensiometer
Cornell University
January 04, 2018 - N°20180003608

A device for measuring a chemical potential of a fluid in a plant tissue includes a cavity disposed within a sensor body as a liquid reservoir. The cavity is configured for containing therein a liquid, and the cavity including at least one opening. At least two porous membrane layers are positioned at least in part over the at least one ...
Mems devices and processes
Cirrus Logic International Semiconductor Ltd.
January 04, 2018 - N°20180002168

The application describes mems transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
Mems device with multi pressure
Taiwan Semiconductor Manufacturing Company, Ltd.
January 04, 2018 - N°20180002166

Micro-electromechanical (mems) devices and methods of forming are provided. The mems device includes a first substrate including a first conductive feature, a first movable element positioned over the first conductive feature, a second conductive feature, and a second movable element positioned over the second conductive feature. The mems device also includes a cap bonded to the first substrate, where the ...
Protective coating on trench features of a wafer and method of fabrication thereof
Robert Bosch Gmbh
January 04, 2018 - N°20180002165

A coating for protecting a wafer from moisture and debris due to dicing, singulating, or handling the wafer is provided. A semiconductor sensor device comprises a wafer having a surface and at least one trench feature and the protective coating covering the trench feature. The trench feature comprises a plurality of walls and the walls are covered with the protective ...
3d mems device with hermetic cavity
Motion Engine Inc.
January 04, 2018 - N°20180002163

A three dimensional (3d) micro-electro-mechanical system (mems) device is provided. The device comprises a central mems wafer, and top and bottom cap wafers. The mems wafer includes a mems structure, such as an inertial sensor. The 5 top cap wafer, the bottom cap wafer and the mems wafers are stacked along a stacking axis and together form at least one hermetic ...
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