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Mems

Mems-related patent applications - as published by the U.S. Patent and Trademark Office (USPTO).


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Mems device
Infineon Technologies Ag
June 22, 2017 - N°20170180900

A mems device includes a backplate electrode and a membrane disposed spaced apart from the backplate electrode. The membrane includes a displaceable portion and a fixed portion. The backplate electrode and the membrane are arranged such that an overlapping area of the fixed portion of the membrane with the backplate electrode is less than maximum overlapping.
System for continuous monitoring of body sounds
International Business Machines Corporation
June 22, 2017 - N°20170180870

A wearable monitoring system includes a microelectromechanical (mems) microphone to receive acoustic signal data through skin of a user. An integrated circuit chip is bonded to and electrically connected to the mems microphone. A portable power source is connected to at least the integrated circuit chip. A flexible substrate is configured to encapsulate and affix the mems microphone and the ...
Doped substrate regions in mems microphones
Robert Bosch Gmbh
June 22, 2017 - N°20170180869

Systems and methods for preventing electrical leakage in a mems microphone. In one embodiment, the mems microphone includes a semiconductor substrate, an electrode, a first insulation layer, and a doped region. The first insulation layer is formed between the electrode and the semiconductor substrate. The doped region is implanted in at least a portion of the semiconductor substrate where the ...
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Digital correcting network for microelectromechanical systems microphone
Cirrus Logic International Semiconductor Ltd.
June 22, 2017 - N°20170180858

In accordance with embodiments of the present disclosure, a system may include a digital correcting network for correcting for an intrinsic highpass filter of a microelectromechanical systems (mems) microphone such that a combined phase and magnitude response of a cascade of the intrinsic highpass filter and the digital correcting network substantially approximates the response of a target highpass filter.
Autofocus camera using mems actuation of image sensor
Cirrus Logic International Semiconductor Ltd.
June 22, 2017 - N°20170180619

A miniature camera module that achieves autofocus (af) by applying actuation to the image sensor using mems (micro electro mechanical system) actuators comprising of a piston-tube electrostatic actuators. The camera comprises of a mems piston-tube actuator, an image sensor die, an ic package, a housing, and a lens barrel. The image sensor die is attached and is electrically bonded to ...
Optical scanning device and optical scanning method
Toshiba Tec Kabushiki Kaisha
June 22, 2017 - N°20170180583

An optical scanning device according to an embodiment includes a light source, a mems mirror, a mems-mirror driving unit, a control unit, and a sensor. The light source radiates a plurality of laser beams that scan a photoconductive drum. The mems mirror includes a reflection surface that reflects the plurality of laser beams radiated from the light source. The mems-mirror ...
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Microelectromechanical probe, method of manufacturing the same and probe set
Mpi Corporation
June 22, 2017 - N°20170176497

A microelectromechanical probe is manufactured by a mems manufacturing process forming a probe body and a cutting process providing a pinpoint portion a cutting face. The probe has a top surface, a body portion, and a pinpoint portion extended in a probing direction from the body portion and provided with first and second sides and a probing end oriented in ...
Stress-isolated absolute pressure sensor
Continental Automotive Systems, Inc.
June 22, 2017 - N°20170176278

Suspending a microelectromechanical system (mems) pressure sensing element inside a cavity using spring-like corrugations or serpentine crenellations, reduces thermally-mismatched mechanical stress on the sensing element. Overlaying the spring-like structures and the sensing element with a gel further reduces thermally-mismatched stress and vibrational dynamic stress.
Temperature stabilizing enclosure
Invensense, Inc.
June 22, 2017 - N°20170176062

A device includes a substrate, a micro-electro-mechanical system (mems) device disposed on the substrate, a controller disposed on the substrate, a heating element, and an enclosure. The heating element is configured to generate heat in response to a signal generated by the controller. The enclosure encloses the mems sensor device, the controller, and the heating element. The controller is configured ...
Method and system for electroplating a mems device
Texas Instruments Incorporated
June 22, 2017 - N°20170175283

In described examples, a method for electroplating a semiconductor device includes: forming a metal foil; forming an inert anode support; attaching the metal foil to the inert anode support to form an anode; forming a cathode using a semiconductor substrate; immersing the anode and the cathode within an electrolyte solution; forming a circuit with a current source, the anode and ...
Method of addressing film liftoff in mems fabrication
Texas Instruments Incorporated
June 22, 2017 - N°20170174510

A method of fabricating a mems device. A first spacer is formed above a cmos substrate containing circuitry. Vias are formed within the first spacer. A first metal is formed above the first spacer and vias and patterned to form a mems element. A second spacer is formed above the mems element and first spacer. A via is formed within ...
Mems sensor with side port and method of fabricating same
Nxp Usa, Inc.
June 22, 2017 - N°20170174509

A mems sensor package comprises a mems die that includes a substrate having a sensor formed thereon and a cap layer coupled to the substrate. The cap layer has a cavity overlying a substrate region at which the sensor resides. A port extends between the cavity and a side wall of the mems die and enables admittance of fluid into ...
Method for manufacturing mems torsional electrostatic actuator
Csmc Technologies Fab1 Co., Ltd.
June 22, 2017 - N°20170174508

A method for manufacturing an mems torsional electrostatic actuator comprises: providing a substrate, wherein the substrate comprises a first silicon layer, a buried oxide layer and a second silicon layer that are laminated sequentially; patterning the first silicon layer and exposing the buried oxide layer to form a rectangular upper electrode plate separated from a peripheral region, wherein the upper ...
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Mems sensor cap with multiple isolated electrodes
Analog Devices, Inc.
June 22, 2017 - N°20170174504

The cap wafer for a mems device includes multiple electrically isolated electrodes that can be bonded and electrically connected to separate electrical contacts on a mems device wafer. The electrically isolated electrodes can be used for any of a variety of functions, such as for apply a force to a movable mems structure on the mems device wafer (e. G., ...
Mems microphone and manufacturing method thereof
Hyundai Motor Company
June 15, 2017 - N°20170171652

A micro-electro-mechanical system (mems) microphone and a manufacturing method thereof are provided. The mems microphone includes a substrate that is formed from a flexible polymer. A sound sensing component is disposed at a first side of the substrate and includes a fixing membrane and a vibration membrane for sensing a sound. A signal processor is disposed at a second side ...
Dual trench deep trench based unreleased mems resonators
Hyundai Motor Company
June 15, 2017 - N°20170170805

A deep trench (dt) mems resonator includes a periodic array of unit cells, each of which includes a single dt formed in a semiconductor substrate and filled with a material whose acoustic impedance is different than that of the substrate. The filled dt is used as both an electrical capacitor and a mechanical structure at the same time, making it ...
Mems resonator
Hyundai Motor Company
June 15, 2017 - N°20170170802

A mems resonator includes a main substrate forming a receiving part at a center of the main substrate; a mass body having one end part and a center part elastically supported by both sides of the main substrate; a driving unit configured at one side of the receiving part on the main substrate and producing a driving torque by a ...
Distributed direct drive arrangement for driving cells
Kymeta Corporation
June 15, 2017 - N°20170170572

A method and apparatus is disclosed herein for a direct drive mechanism for driving cells (e. G., liquid crystal (lc) cells, rf mems cells, etc.). In one embodiment, the antenna comprises an antenna element array having a plurality of antenna elements with each antenna element having one or more cells (e. G., liquid crystal (lc) cell, rf mems cell, etc.); ...
Mems grid for manipulating structural parameters of mems devices
Mems Drive, Inc.
June 15, 2017 - N°20170170059

A system and method for manipulating the structural characteristics of a mems device include etching a plurality of holes into the surface of a mems device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the mems device.
Identification and compensation of mems accelerometer errors
Invensense International, Inc.
June 15, 2017 - N°20170168087

A microelectromechanical (mems) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the ...
Accelerometer sense path self-test
Invensense International, Inc.
June 15, 2017 - N°20170168086

A microelectromechanical (mems) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the ...
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