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Mems

Mems-related patent applications - as published by the U.S. Patent and Trademark Office (USPTO).


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Micro-electro-mechanical acoustic transducer device with improved detection features and corresponding electronic apparatus
Stmicroelectronics S.r.l.
April 12, 2018 - N°20180103326

Described herein is a mems acoustic transducer device provided with a micromechanical detection structure that detects acoustic-pressure waves and supplies a transduced electrical quantity, and with an integrated circuit operatively coupled to the micromechanical detection structure and having a reading module that generates at output an audio signal as a function of the transduced electrical quantity. The integrated circuit is ...
Folded tether structure for mems sensor devices
Analog Devices, Inc.
April 12, 2018 - N°20180100874

A microelectromechanical systems (mems) sensor device with a compound folded tether is disclosed. The compound folded tether connects a movable proof mass to a substrate, and includes folds composed of multiple short segments aligned with each other to form a longer composite segment having multiple breaks along its length. The use of multiple short segments to create a longer composite ...
System of power-saving in mems sensor applications
Texas Instruments Incorporated
April 12, 2018 - N°20180100749

A system comprises a plurality of sensors, a sensor processor, and a sampling rate engine. The sensor processor is coupled to an output of each sensor of the plurality of sensors. The sensor processor estimates user dynamics in response to a first output signal of a first sensor of the plurality of sensors. The sampling rate engine is coupled to ...
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Semiconductor mems structure
Taiwan Semiconductor Manufacturing Company Ltd.
April 12, 2018 - N°20180099865

The present disclosure provides a structure. The structure comprises a cavity enclosed by a first substrate and a second substrate opposite to the first substrate. The structure also includes a movable membrane in the cavity. Further, the structure includes a mesa in the cavity and the mesa is protruded from a surface of the first substrate. In addition, the structure ...
System and methods of concentrating airborne particles
The Board Of Trustees Of The University Of Illinoi
April 12, 2018 - N°20180099283

The present disclosure provides for a system and method of concentrating airborne particles, specifically toward the center of one or more intake channels of pm sensors. The invention provides a simple and cost effective device that, when used in conjunction with a mems pm sensor or the like, can increase the sensitivity of said device by orders of magnitude. An ...
Blood vessel sizing device
Sizer Llc
April 12, 2018 - N°20180098820

Medical devices and methods that provide for improved accuracy when positioning of a synthetic structure, such as a mems device or a stent, within a biological feature of a patient, such as a blood vessel, are disclosed. A blood vessel sizing device is configured for placement on the skin of a patient near a feature of interest (e. G. A ...
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Compartment for magnet placement
Intel Corporation
April 05, 2018 - N°20180095503

An apparatus is provided which comprises: a chassis compartment having a bottom surface and walls orthogonal to the bottom, wherein the chassis compartment comprises: a rectangular opening, which may be designed to accept a microelectromechanical (mems) device and four slots, which may be designed to accept one or more magnet(s), extending outwardly from the rectangular opening, wherein each of ...
High power handling optical spatial light modulator
Silicon Light Machines Corporation
April 05, 2018 - N°20180095267

Laser-based material processing systems including a micro-electromechanical system devices (mems) based reflective, optical modulator with dielectric mirrors for high power handling and methods of manufacturing and using the same are described. Generally, the system includes a workpiece support, a laser, a workpiece support, a laser, a mems based reflective, optical modulator to modulate a beam generated by the laser; and ...
Bio-microelectromechanical system transducer and associated methods
University Of Central Florida Research Foundation, Inc.
April 05, 2018 - N°20180095073

The invention discloses a bio-mems transducer comprising a cultured myotube and a piezoelectric microcantilever having the myotube attached thereto along a lengthwise extent of said microcantilever. The transducer may include an input/output processor operably connected with said piezoelectric microcantilever to process electrical signals received therefrom and to send electrical signals thereto. The invention may operate as a biosensor wherein ...
Mems gyroscope having a high stability with respect to temperature and humidity variations
Stmicroelectronics S.r.l.
April 05, 2018 - N°20180094929

A mems device including a main die that may be coupled to a secondary die, which forms a frame, and at least one first mobile mass elastically coupled to the frame, the main die forming: a driving stage that drives the first mobile mass so that it oscillates, parallel to a first direction, with frequency-modulated displacements; and a processing stage, ...
Method of manufacturing mems switches with reduced switching voltage
International Business Machines Corporation
April 05, 2018 - N°20180093884

An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode, forming a second cantilevered electrode over an electrode and operable to contact the first cantilevered electrode upon an application of a voltage to the electrode, and forming an arm on the first cantilevered electrode with an extending protrusion extending upward from an upper ...
Mems device, liquid ejecting head, liquid ejecting apparatus, method for manufacturing mems device
Seiko Epson Corporation
April 05, 2018 - N°20180093882

There is provided a mems device including: a substrate having a resin portion that protrudes from one surface thereof and is made of a resin, in which the first wiring extends along a first direction on the one surface from a position overlapping the resin portion to a position deviating from the resin portion, and in which a width of ...
Cavity with silicon on insulator mems pressure sensing device with an extended shallow polygon cavity
Continental Automotive Systems, Inc.
April 05, 2018 - N°20180093881

An improved microelectromechanical system (mems) pressure sensing device has an extended shallow polygon cavity on a top side of a silicon supporting substrate. A buried silicon dioxide layer is formed between the top side of the supporting substrate and a bottom side of a device layer. Piezoresistors and bond pads are formed and located on a top side of the ...
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Pressure gradient microphone for measuring an acoustic characteristic of a loudspeaker
Apple Inc.
March 29, 2018 - N°20180091910

A differential pressure gradient micro-electro-mechanical system (mems) microphone for measuring an acoustic characteristic of a loudspeaker. The microphone includes a mems microphone housing and a compliant membrane mounted in the mems microphone housing, the compliant membrane dividing the mems microphone housing into a first chamber and a second chamber. The first chamber includes a primary port open to a first ...
Mems device and process
March 29, 2018 - N°20180091906

A substrate; a primary membrane supported in a fixed relation relative to the substrate and a secondary membrane provided in a plane overlying the primary membrane. The secondary membrane is mechanically coupled to the primary membrane by a substantially rigid coupling structure. A rigid support plate may be interposed between the primary and secondary membranes.
Circuit board module comprising a continuous cavity, associated sonic transducer assembly, and production method
Usound Gmbh
March 29, 2018 - N°20180091905

The invention relates to a circuit board module (2) for a sound transducer assembly (1) for generating and/or detecting sound waves in the audible wavelength spectrum, with a circuit board (4), which features a recess (6) with a first opening (7), and at least a part of a mems sound transducer (5), which is arranged in the area of the first opening (7), such that the ...
Tunable receiver including microelectromechanical (mems) mirrors, a transceiver or module comprising the same, and methods ...
Source Photonics (chengdu) Co., Ltd.
March 29, 2018 - N°20180091229

An optical or optoelectronic receiver and module, and methods of making and using the same, are disclosed. The receiver includes a photodetector, a first microelectromechanical device configured to reflect a multi-wavelength optical signal, a thin film filter configured to receive the multi-wavelength optical signal reflected by the first microelectromechanical device and separate a single-wavelength optical signal from the multi-wavelength optical ...
Adhesive tape separating tool, manufacturing apparatus of semiconductor chip, manufacturing apparatus of mems device manufacturing ...
Seiko Epson Corporation
March 29, 2018 - N°20180090351

Provided is an adhesive tape separating tool which separates adhesive tape bonded to one face of a work which includes an opening on the one face from the work, in which a protrusion portion forming region in which a plurality of protrusion portions are formed is provided on a face on a side which comes into contact with the work ...
Frequency-modulating sensor array
Sitime Corporation
March 29, 2018 - N°20180087984

Spatially-distributed resonant mems sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Pedestrian sensor assistance in a mobile device during typical device motions
Qualcomm Incorporated
March 29, 2018 - N°20180087904

Techniques provided herein are directed toward resolving a direction of travel of a mobile device based on mems sensor data by identifying a type of motion the mobile device is subject to and offsetting vertical acceleration data with horizontal acceleration data by a predetermined time offset based on the identified type of motion. The offset vertical and horizontal acceleration data ...
Coupled accordion springs in microelectromechanical systems (mems) devices
Analog Devices, Inc.
March 29, 2018 - N°20180087491

Microelectromechanical systems (mems) devices are described that include a proof mass movably connected to a substrate by accordion springs disposed on opposite sides of the proof mass, with a coupler coupling two of the accordion springs together. The coupler is a bar in some implementations, and may be rigid. The coupler therefore restricts the motion of the accordion springs relative ...
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