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Mems

Mems-related patent applications - as published by the U.S. Patent and Trademark Office (USPTO).


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Microelectromechanical systems (mems) microphone feedback filtering
Invensense, Inc.
June 14, 2018 - N°20180167730

Feedback filtering for microelectromechanical systems (mems) sensors is described. An exemplary mems sensor system or apparatus can comprise a mems sensor and an associated integrated circuit (ic) or portions there of that facilitate shaping mems sensor frequency response by controlling or filtering a feedback signal.
Data flow configuration in hybrid system of silicon and micro-electro-mechanical-switch (mems) elements
International Business Machines Corporation
June 14, 2018 - N°20180167310

Certain embodiments of the present disclosure provide a method for communicating data flows. The method generally includes receiving control flow information corresponding to a data flow for communication from a first device to a second device, and determining one or more characteristics of the data flow based on the control flow information.
Smart motor driver architecture with built-in mems sensor based early diagnosis of faults
Stmicroelectronics, Inc.
June 14, 2018 - N°20180167016

A system in package encloses a sensor and motor driver circuit. In an implementation, the sensor is an integrated circuit micro-electro-mechanical-systems (mems) sensor and the driver circuit is a motor driver circuit.
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Navigational aid method, computer program product and inertial navigation system therefor
Safran
June 14, 2018 - N°20180164102

The invention relates to a navigational aid method for an inertial navigation system including at least one inertial sensor (4) having a sensitive axis (x-x), each inertial sensor (4) comprising an asg gyroscope (8) able to deliver an asg signal representative of a rotation about the corresponding sensitive axis (x-x), and a mems gyroscope (10) able to deliver a mems signal representative of a ...
Mems led zoom
Intel Corporation
June 14, 2018 - N°20180163948

The present techniques are related to an apparatus for an mems led zoom. The apparatus for includes an led light source and a collimation lens.
Semiconductor device and fabrication method thereof
United Microelectronics Corp.
June 14, 2018 - N°20180162725

A semiconductor device includes a semiconductor substrate comprising a mos transistor. A mems device is integrally constructed above the mos transistor.
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Gasses for increasing yield and reliability of mems devices
Texas Instruments Incorporated
June 14, 2018 - N°20180162721

In described examples, a mems device is enclosed within a sealed package including nonmetal oxide gasses at levels greater than 1% by volume. In at least one example, the mems device is protected against premature failure from various causes, including charging, particle growth and stiction by moieties of the nonmetal oxide gasses reacting with various exposed surfaces within the package of ...
Mems package with roughend interface
Taiwan Semiconductor Manufacturing Co., Ltd.
June 14, 2018 - N°20180162720

A method includes: providing a first substrate on which a plurality of first semiconductor devices is formed; providing a second substrate on which a plurality of second semiconductor devices is formed; and coupling the first and second substrates by contacting respective dummy pads of the first and second substrates, wherein at least one of the dummy pads of the first ...
Sensing device
Silicon Integrated Systems Corp.
June 07, 2018 - N°20180160233

A sensing device comprises a charge pump, a mems sensor, a source follower and a pga. The charge pump is configured to provide a pump voltage.
Mems microphone with increased back volume
Apple Inc.
June 07, 2018 - N°20180160218

A micro-electro-mechanical system (mems) microphone assembly including an enclosure having a top side and a bottom side that define a first chamber having a first volume and an acoustic inlet port formed through one of the top side or the bottom side. The assembly further including a mems microphone mounted within the first chamber, the mems microphone defining a second ...
Mems process power
Vesper Technologies Inc.
June 07, 2018 - N°20180159021

A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.. .
Method for controlling the position of a mems mirror
Intel Corporation
June 07, 2018 - N°20180157029

According to the present invention there is provided a method of controlling the position of a mems mirror in a mems device, wherein the mems device comprises, a mems mirror, a magnet which provides a magnetic field (b), an actuating means which operatively cooperates with the mems mirror so that it can apply a force to the mems mirror which ...
Optical filter device, optical module, electronic apparatus, and mems device
Seiko Epson Corporation
June 07, 2018 - N°20180157026

An optical filter device includes a wavelength variable interference filter that has a fixed substrate provided with a fixed reflective film and a movable substrate provided with a movable reflective film, a casing that has an inner space for storing the wavelength variable interference filter therein, and a fixation portion that fixes the wavelength variable interference filter to the casing. ...
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Sensing device
Silicon Integrated Systems Corp.
June 07, 2018 - N°20180155187

A sensing device includes a mems sensor and an adjustable amplifier. The mems sensor is configured to generate an input signal according to environmental changes.
Low-profile stacked-die mems resonator system
Sitime Corporation
June 07, 2018 - N°20180155186

A low-profile packaging structure for a microelectromechanical-system (mems) resonator system includes an electrical lead having internal and external electrical contact surfaces at respective first and second heights within a cross-sectional profile of the packaging structure and a die-mounting surface at an intermediate height between the first and second heights. A resonator-control chip is mounted to the die-mounting surface of the ...
Particle manipulation system with out-of-plane channel and submerged dicing trench
Owl Biomedical, Inc.
June 07, 2018 - N°20180154361

A particle manipulation system uses a mems-based, microfabricated particle manipulation device which has a sample inlet channel, output channels, and a movable member formed on a substrate. The device may be used to separate a target particle from non-target material in a sample stream.
Low voltage, low power mems transducer with direct interconnect capability
Exo Imaging Inc.
June 07, 2018 - N°20180153510

A transceiver includes an array of pmut elements, where each pmut element includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode; and a first electrode disposed on the piezoelectric layer. Each pmut element exhibits one or more modes of vibration..
Microelectromechanical systems microphone with electrostatic force feedback to measure sound pressure
Cirrus Logic International Semiconductor Ltd.
May 31, 2018 - N°20180152798

A mems may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate, and a diaphragm configured to mechanically displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The diaphragm may comprise third and fourth electrodes electrically ...
Biasing of electromechanical systems transducer with alternating-current voltage waveform
Cirrus Logic International Semiconductor Ltd.
May 31, 2018 - N°20180152794

A mems microphone may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate and a diaphragm configured to displace relative to the backplate as a function of sound pressure incident upon the diaphragm, the diaphragm comprising third and fourth electrodes electrically isolated ...
Mems device and method for producing a mems device
Infineon Technologies Austria Ag
May 31, 2018 - N°20180152793

A mems device is provided. The mems device includes a membrane, and at least one electrode arranged at a distance from the membrane.
Mems device
Cirrus Logic International Semiconductor Ltd.
May 31, 2018 - N°20180152792

A mems transducer comprising: a flexible membrane, the flexible membrane comprising a first membrane electrode; a back plate, the back plate comprising a first back plate electrode; wherein the back plate is supported in a spaced relation with respect to the flexible membrane. The mems transducer is configured to provide electrical connections to the first membrane electrode and the first ...
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