Images List Premium Download Classic

Mems Devices

Mems Devices-related patent applications - as published by the U.S. Patent and Trademark Office (USPTO).


loading
Gasses for increasing yield and reliability of mems devices
Texas Instruments Incorporated
June 14, 2018 - N°20180162721

In described examples, a mems device is enclosed within a sealed package including nonmetal oxide gasses at levels greater than 1% by volume. In at least one example, the mems device is protected against premature failure from various causes, including charging, particle growth and stiction by moieties of the nonmetal oxide gasses reacting with various exposed surfaces within the package of ...
Mems devices and processes
Cirrus Logic International Semiconductor Ltd.
May 31, 2018 - N°20180148315

The application describes a mems transducer comprising a substrate having a cavity. The transducer exhibits a membrane layer supported relative to the substrate to define a flexible membrane.
Contact material for mems devices
Innovative Micro Technology
May 24, 2018 - N°20180144879

The present application discloses a method for forming electrical contacts on a semiconductor substrate. The method includes forming a first metal layer over the substrate, and forming a layer of a second metal oxide by sputter deposition of a second metal in an oxygen environment..
Mems Devices Patent Pack
Download + patent application PDFs
Mems Devices Patent Applications
Download + Mems Devices-related PDFs
For professional research & prior art discovery
inventor
  • + full patent PDF documents of Mems Devices-related inventions.
  • Exact USPTO filing data with full-text, images, drawings & claims.
  • Index pages: Table View and Image-Grid View layouts. All images in each PDF.
Vertical stopper for capping mems devices
Analog Devices, Inc.
May 17, 2018 - N°20180134543

Capped microelectromechanical systems (mems) devices are described. In at least some situations, the mems device includes one or more masses which move.
Method and apparatus for reducing in-process and in-use stiction for mems devices
Taiwan Semiconductor Manufacturing Company, Ltd.
May 17, 2018 - N°20180134542

The present disclosure involves forming a method of fabricating a micro-electro-mechanical system (mems) device. A plurality of openings is formed in a first side of a first substrate.
Method and structure for cmos-mems thin film encapsulation
Taiwan Semiconductor Manufacturing Company, Ltd.
May 03, 2018 - N°20180118560

Representative methods for sealing mems devices include depositing insulating material over a substrate, forming conductive vias in a first set of layers of the insulating material, and forming metal structures in a second set of layers of the insulating material. The first and second sets of layers are interleaved in alternation.
Mems Devices Patent Pack
Download + patent application PDFs
Mems Devices Patent Applications
Download + Mems Devices-related PDFs
For professional research & prior art discovery
inventor
  • + full patent PDF documents of Mems Devices-related inventions.
  • Exact USPTO filing data with full-text, images, drawings & claims.
  • Index pages: Table View and Image-Grid View layouts. All images in each PDF.
Internal tire windmill energy harvester
Bridgestone Americas Tire Operations, Llc
March 22, 2018 - N°20180079265

Electrical system may be configured to operate inside a tire mounted to a wheel. Electrical system may include a plurality of microelectromechanical system (mems) devices including a gas flow energy receiver mechanically coupled to at least one base.
Mems device and process
Cirrus Logic International Semiconductor Ltd.
February 01, 2018 - N°20180035190

This application relates to mems devices, especially mems capacitive transducers and to processes for forming such mems transducer that provide increased robustness and resilience to acoustic shock. The application describes a mems transducer (400) having at least one membrane layer (101) supported so as to define a flexible membrane.
Integration scheme for microelectromechanical systems (mems) devices and complementary metal-oxide-semiconductor (cmos) devices
Taiwan Semiconductor Manufacturing Co., Ltd.
February 01, 2018 - N°20180029882

Processes for integrating complementary metal-oxide-semiconductor (cmos) devices with microelectromechanical systems (mems) devices are provided. In some embodiments, the mems devices are formed on a sacrificial substrate or wafer, the sacrificial substrate or wafer is bonded to a cmos die or wafer, and the sacrificial substrate or wafer is removed.
Mems devices having tethering structures
Taiwan Semiconductor Manufacturing Co., Ltd.
January 25, 2018 - N°20180022603

The present disclosure relates to a method for fabricating a micro-electromechanical system (mems) device. In the method, a carrier wafer is received.
Use of a reactive, or reducing gas as a method to increase contact lifetime in ...
International Business Machines Corporation
January 11, 2018 - N°20180009657

A mems device comprises an electro mechanical element in a sealed chamber containing a gas comprising a reactive gas selected to react with any contaminants that may be present or formed on the operating surfaces of the device in a manner to maximize the electrical conductivity of the surfaces during operation of the device. The mems device may comprise a ...
Mems devices and processes
Cirrus Logic International Semiconductor Ltd.
January 04, 2018 - N°20180007474

A mems transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane.
Mems devices and processes
Cirrus Logic International Semiconductor Ltd.
January 04, 2018 - N°20180002168

The application describes mems transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described..
Mems Devices Patent Pack
Download + patent application PDFs
Mems Devices Patent Applications
Download + Mems Devices-related PDFs
For professional research & prior art discovery
inventor
  • + full patent PDF documents of Mems Devices-related inventions.
  • Exact USPTO filing data with full-text, images, drawings & claims.
  • Index pages: Table View and Image-Grid View layouts. All images in each PDF.
Mems device for harvesting sound energy and methods for fabricating same
Globalfoundries Singapore Pte. Ltd.
December 21, 2017 - N°20170366107

Micro-electro-mechanical system (mems) devices for harvesting sound energy and methods for fabricating mems devices for harvesting sound energy are provided. In an embodiment, a method for fabricating a mems device for harvesting sound energy includes forming a pressure sensitive mems structure disposed over a semiconductor substrate and including a suspended structure in a cavity.
Resistive switching for mems devices
Robert Bosch Gmbh
December 21, 2017 - N°20170363478

A mems device includes a bolometer attached to a silicon wafer by a base portion of at least one anchor structure. The base portion comprises a layer stack having a metal-insulator-metal (mim) configuration such that the base portion acts as a resistive switch such that, when the first dc voltage is applied to the patterned conductive layer, the base portion ...
Anti-getter: expandable polymer microspheres for mems devices
Robert Bosch Gmbh
December 21, 2017 - N°20170362078

A method of fabricating a mems device includes depositing an expandable material into a first recess of a cap wafer. The cap wafer includes a plurality of walls that surround and define the first recess and a second recess.
Method and system for mems devices with dual damascene formed electrodes
Invensense, Inc.
December 14, 2017 - N°20170355593

Methods and systems for mems devices with dual damascene formed electrodes is disclosed and may include forming first and second dielectric layers on a semiconductor substrate that includes a conductive layer at least partially covered by the first dielectric layer; removing a portion of the second dielectric layer; forming vias through the second dielectric layer and at least a portion ...
Mems electrical contact systems and methods
Digitaloptics Corporation
November 16, 2017 - N°20170329098

A microelectromechanical systems (mems) device may be provided with one or more sintered electrical contacts. The mems device may be a mems actuator or a mems sensor.
Subterranean formation characterization using microelectromechanical system (mems) devices
Halliburton Energy Services, Inc.
November 09, 2017 - N°20170322341

Systems and methods for formation characterization in a subterranean formation are disclosed. A set of microelectromechanical system (mems) devices may be disposed in a circulating fluid.
Mems grid for manipulating structural parameters of mems devices
Mems Drive, Inc.
November 09, 2017 - N°20170320724

A system and method for manipulating the structural characteristics of a mems device include etching a plurality of holes into the surface of a mems device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the mems device.. .
Subterranean formation characterization using microelectromechanical system (mems) devices
November 02, 2017 - N°20170314391

Systems and methods for formation characterization in a subterranean formation are disclosed. A set of microelectromechanical system (mems) devices may be disposed in a circulating fluid.
Loading