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This page is updated frequently with new Hard Mask-related patent applications. Subscribe to the Hard Mask RSS feed to automatically get the update: related Hard RSS feeds. RSS updates for this page: Hard Mask RSS RSS


Silicon nitride gate encapsulation by implantation

Methods of patterning small via pitch dimensions

Date/App# patent app List of recent Hard Mask-related patents
08/28/14
20140242797
 Semiconductor fabrication method using stop layer patent thumbnailnew patent Semiconductor fabrication method using stop layer
A method of making a semiconductor assembly including the steps of: (i) providing an initial-state assembly including: (a) a fin layer, and (b) a hard mask layer located on top of at least a portion of the fin layer; (ii) performing a first material removal on the initial-state assembly, by cmp, to yield a second-state assembly; and (iii) performing a second material removal on the second-state assembly to yield a third-state assembly. In the first material-removal step: (i) any remaining portion of the soft sacrificial layer is removed, (ii) a portion of the fin layer is removed, and (iii) the lower portion of the hard mask layer is used as a stop layer for the second material removal..
08/28/14
20140242794
 Methods of patterning small via pitch dimensions patent thumbnailnew patent Methods of patterning small via pitch dimensions
Integrated circuit methods are described. The methods include providing a photomask that includes two main features for two via openings and further includes an optical proximity correction (opc) feature linking the two main features; forming a hard mask layer on a substrate, the hard mask layer including two trench openings; forming a patterned resist layer over the hard mask layer using the photomask, wherein the patterned resist layer includes a peanut-shaped opening with two end portion aligned with the two trench openings of the hard mask layer, respectively; and performing a first etch process to the substrate using the hard mask layer and the patterned resist layer as a combined etch mask..
08/28/14
20140241047
 Self-aligned process for fabricating voltage-gated mram patent thumbnailnew patent Self-aligned process for fabricating voltage-gated mram
A stt-mram comprises apparatus and a method of manufacturing a spin-torque magnetoresistive memory and a plurality of a three-terminal magnetoresistive memory element having a voltage-gated recording. A bit line is coupled to the memory element through an upper electrode provided on the top surface of a reference layer, a select cmos is coupled to the recording layer of the memory element through a middle second electrode and a via and a digital line is coupled to a voltage gate which is insulated from the recording layer by a dielectric layer and is used to adjust the switching write current.
08/28/14
20140239503
 Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects patent thumbnailnew patent Integrated circuits and methods for fabricating integrated circuits with capping layers between metal contacts and interconnects
Integrated circuits and methods for fabricating integrated circuits are provided. In an exemplary embodiment, a method for fabricating integrated circuits includes forming a metal contact structure that is electrically connected to a device.
08/28/14
20140239420
 Silicon nitride gate encapsulation by implantation patent thumbnailnew patent Silicon nitride gate encapsulation by implantation
A method of forming a finfet structure which includes forming fins on a semiconductor substrate; forming a gate wrapping around at least one of the fins, the gate having a first surface and an opposing second surface facing the fins; depositing a hard mask on a top of the gate; angle implanting nitrogen into the first and second surfaces of the gate so as to form a nitrogen-containing layer in the gate that is below and in direct contact with the hard mask on top of the gate; forming spacers on the gate and in contact with the nitrogen-containing layer; and epitaxially depositing silicon on the at least one fin so as to form a raised source/drain. Also disclosed is a finfet structure..
08/28/14
20140239401
 Silicon nitride gate encapsulation by implantation patent thumbnailnew patent Silicon nitride gate encapsulation by implantation
A finfet structure which includes: silicon fins on a semiconductor substrate, each silicon fin having two sides and a horizontal surface; a gate wrapping around at least one of the silicon fins, the gate having a first surface and an opposing second surface facing the at least one of the silicon fins; a hard mask on a top surface of the gate; a silicon nitride layer formed in each of the first and second surfaces so as to be below and in direct contact with the hard mask on the top surface of the gate; spacers on the gate and in contact with the silicon nitride layer; and epitaxially deposited silicon on the at least one of the silicon fins so as to form a raised source/drain.. .
08/21/14
20140235050
 Method of semiconductor integrated circuit fabrication patent thumbnailMethod of semiconductor integrated circuit fabrication
A method of fabricating a semiconductor integrated circuit (ic) is disclosed. The method includes providing a substrate and depositing a conductive layer on the substrate.
08/21/14
20140235045
 Method of manufacturing semiconductor device patent thumbnailMethod of manufacturing semiconductor device
A hard mask formed above a gate film is patterned with a first mask pattern, the patterned hard mask film is processed into a gate pattern with a second mask pattern, the gate film is patterned with the hard mask film as a mask, a spacer insulating film is formed, a third mask pattern covering an edges of the gate pattern is formed above the spacer insulating film, the spacer insulating film is etched with the third mask pattern as a mask, and a sidewall insulating film is formed on side walls of the gate film leaving the spacer insulating film in a region of the edge of the gate pattern.. .
08/21/14
20140234468
 Mold blank, master mold, method of manufacturing copy mold and mold blank patent thumbnailMold blank, master mold, method of manufacturing copy mold and mold blank
There is provided a mold blank comprising a hard mask, wherein the hard mask layer has a composition containing chromium, nitrogen, and oxygen and has a content variation structure in which content of the nitrogen is varied continuously or gradually in a layer thickness direction and content of the oxygen is varied in the layer thickness direction continuously or gradually substantially in an opposite direction to the nitrogen.. .
08/14/14
20140227878
 Method for manufacturing small-size fin-shaped structure patent thumbnailMethod for manufacturing small-size fin-shaped structure
A method for manufacturing a small-size fin-shaped structure, comprising: forming a first mask layer and a second mask layer on a substrate in sequence; etching the first mask layer and the second mask layer to form a hard mask pattern, wherein a second mask layer pattern is wider than a first mask layer pattern; eliminating the second mask layer pattern; and performing a dry etching of the substrate by taking the first mask layer pattern as a mask, so as to form a fin-shaped structure. According to the method for manufacturing a small-size fin-shaped structure of the present invention, firstly a large-size hard mask is prepared, then a width controllable small-size hard mask is prepared through a wet corrosion, and finally the bulk silicon wafer is etched, so as to obtain the required small-size fin-shaped structure, thereby improving the electrical properties and the integration level of the device, simplifying the processes and reducing the cost..
08/14/14
20140227877
Method of forming a metal contact opening with a width that is smaller than the minimum feature size of a photolithographically-defined opening
The width of a metal contact opening is formed to be smaller than the minimum feature size of a photolithographically-defined opening. The method forms the metal contact opening by first etching the fourth layer of a multilayered hard mask structure to have a number of trenches that expose the third layer of the multilayered hard mask structure.
08/14/14
20140227853
Method for forming resistance-switching memory cell with multiple electrodes using nano-particle hard mask
In a fabrication process for reversible resistance-switching memory cells, a bottom electrode layer is coated with nano-particles. The nano-particles are used to etch the bottom electrode layer, forming multiple narrow, spaced apart bottom electrode structures for each memory cell.
08/14/14
20140227850
Finfet/tri-gate channel doping for multiple threshold voltage tuning
An embodiment method of controlling threshold voltages in a fin field effect transistor (finfet) includes forming a dummy gate over a central portion of a fin, the central portion of the fin disposed between exterior portions of the fin unprotected by the dummy gate, removing the exterior portions of the fin and replacing the exterior portions of the fin with an epitaxially-grown silicon-containing material, applying a spin-on resist over the dummy gate and the epitaxially-grown silicon-containing material and then removing the spin-on resist over the hard mask of the dummy gate, etching away the hard mask and a polysilicon of the dummy gate to expose a gate oxide of the dummy gate, the gate oxide disposed over the central portion of the fin, and implanting ions into the central portion of the fin through the gate oxide disposed over the central portion of the fin.. .
08/07/14
20140217527
Method of manufacturing mram memory elements
A stt-mram comprises a method to form magnetic random access memory (mram) element array having ultra small dimensions using double photo exposures and etch of their hard masks. The memory cells are located at the cross section of two ultra-narrow photo-resist lines suspended between two large photo-resist bases.
07/31/14
20140213034
Method for forming isolation structure
A method for forming an isolation structure includes the following steps. A hard mask layer is formed on a substrate and a trench is formed in the substrate and the hard mask layer.
07/31/14
20140213033
Methods for fabricating electrically-isolated finfet semiconductor devices
Fabrication methods for semiconductor device structures are provided. In an exemplary embodiment, a method of fabricating an electrically-isolated finfet semiconductor device includes the steps of forming a silicon oxide layer over a semiconductor substrate including a silicon material and forming a first hard mask layer over the silicon oxide layer.
07/31/14
20140213023
Method for fabricating power semiconductor device
A method for fabricating a power semiconductor device is disclosed. A substrate having thereon a plurality of die regions and scribe lanes is provided.
07/31/14
20140212993
Method of manufacturing a magnetoresistive device
A method of manufacturing a magnetoresistive-based device includes etching a hard mask layer, the etching having a selectivity greater than 2:1 and preferably less than 5:1 of the hard mask layer to a photo resist thereover. Optionally, the photo resist is trimmed prior to the etch, and oxygen may be applied during or just subsequent to the trim of the photo resist to increase side shrinkage.
07/31/14
20140210028
Color filter including clear pixel and hard mask
Embodiments of an apparatus including a color filter arrangement formed on a substrate having a pixel array formed therein. The color filter arrangement includes a clear filter having a first clear hard mask layer and a second clear hard mask layer formed thereon, a first color filter having the first clear hard mask layer and the second hard mask layer formed thereon, a second color filter having the first clear hard mask layer formed thereon, and a third color filter having no clear hard mask layer formed thereon.
07/31/14
20140210012
Manufacturing of fet devices having lightly doped drain and source regions
Embodiments described herein generally relate to methods of manufacturing n-type lightly doped drains and p-type lightly doped drains. In one method, a photoresist mask is used to etch a transistor, and the mask is left in place (i.e., reused) to protect other devices and poly while a high energy implantation is performed in alignment with the photoresist mask, such that the implantation is adjacent to the etched transistor.
07/31/14
20140210005
Self-adjusting gate hard mask
An intermediate wafer includes a substrate having a surface and a first dummy gate plug disposed upon a structure, e.g., a fin, supported by the substrate surface; a second dummy gate plug disposed upon the substrate surface; and a first layer in which the first dummy gate plug and the second dummy gate plug are embedded. The first layer exhibits a non-planar surface topography characterized by a depression due at least to a presence of the first dummy gate plug.
07/31/14
20140210004
Self-adjusting gate hard mask
A method provides an intermediate semiconductor device structure and includes providing a water having first dummy gate plugs and second dummy gate plugs embedded in a first layer having a non planar wafer surface topography due at least to a presence of the fist dummy gate plugs; depositing at least one second layer over the first layer, the at least one second layer comprising a hard mask material; and removing at least a portion of the second layer to form a substantially planar wafer surface topography over the first dummy gate plugs and the second dummy gate plugs prior to gate conductor deposition.. .
07/31/14
20140209898
Semiconductor device and method for manufacturing the semiconductor device
When an oxide semiconductor film is microfabricated to have an island shape, with the use of a hard mask, unevenness of an end portion of the oxide semiconductor film can be suppressed. Specifically, a hard mask is formed over the oxide semiconductor film, a resist is formed over the hard mask, light exposure is performed to form a resist mask, the hard mask is processed using the resist mask as a mask, the oxide semiconductor film is processed using the processed hard mask as a mask, the resist mask and the processed hard mask are removed, a source electrode and a drain electrode are formed in contact with the processed oxide semiconductor film, a gate insulating film is formed over the source electrode and the drain electrode, and a gate electrode is formed over the gate insulating film, the gate electrode overlapping with the oxide semiconductor film..
07/24/14
20140206170
Method of fabricating mos device
Provided is a method of fabricating a mos device including the following steps. At least one gate structure is formed on a substrate, wherein the gate structure includes a gate conductive layer and a hard mask layer disposed on the gate conductive layer.
07/24/14
20140206162
Manufacturing method of power mosfet using a hard mask as a stop layer between sequential cmp steps
A manufacturing method of a power mosfet employs a hard mask film over a portion of the wafer surface as a polishing stopper, between two successive polishing steps. After embedded epitaxial growth is performed in a state where a hard mask film for forming trenches is present in at least a scribe region of a wafer, primary polishing is performed by using the hard mask film as a stopper, and secondary polishing is then performed after the hard mask film is removed..
07/24/14
20140206161
Method of fabricating a semiconductor device having a capping layer
A method of semiconductor device fabrication includes forming a first dummy gate structure in a first region of a semiconductor substrate and forming a second dummy gate structure in a second region of the semiconductor substrate. A protective layer (e.g., oxide and/or silicon nitride hard mask) is formed on the second dummy gate structure.
07/24/14
20140203447
Metal lines having etch-bias independent height
A dielectric material stack including at least a via level dielectric material layer, at least one patterned etch stop dielectric material portion, a line level dielectric material layer, and optionally a dielectric cap layer is formed over a substrate. At least one patterned hard mask layer including a first pattern can be formed above the dielectric material stack.
07/24/14
20140203369
Fin field-effect transistors and fabrication method thereof
A method is provided for fabricating a fin field-effect transistor. The method includes providing a semiconductor substrate, and forming a plurality of fins with hard mask layers and an isolation structure.
07/24/14
20140203357
Semiconductor device and method of manufacturing the same
According to a method of manufacturing a semiconductor device, hard mask lines are formed in parallel in a substrate and the substrate between the hard mask lines is etched to form grooves. A portion of the hard mask line and a portion of the substrate between the grooves are etched.
07/17/14
20140199832
Titanium oxynitride hard mask for lithographic patterning
A vertical stack including a dielectric hard mask layer and a titanium nitride layer is formed over an interconnect-level dielectric material layer such as an organosilicate glass layer. The titanium nitride layer may be partially or fully converted into a titanium oxynitride layer, which is subsequently patterned with a first pattern.
07/17/14
20140199819
Method of fabricating capacitor structure
A method of fabricating a capacitor structure includes the following steps. Firstly, a substrate is provided.
07/17/14
20140199628
Lithographic material stack including a metal-compound hard mask
A lithographic material stack including a metal-compound hard mask layer is provided. The lithographic material stack includes a lower organic planarizing layer (opl), a dielectric hard mask layer, and the metal-compound hard mask layer, an upper opl, an optional anti-reflective coating (arc) layer, and a photoresist layer.
07/10/14
20140193981
Photo resist trimmed line end space
One or more techniques or systems for forming a line end space structure are provided herein. In some embodiments, a first patterned second hard mask (hm) region is formed above a first hm region.
07/10/14
20140193980
Patterned line end space
One or more techniques or systems for forming a line end space structure are provided herein. In some embodiments, a first patterned second hard mask (hm) region is formed above a first hm region.
07/10/14
20140193974
Multi-patterning method and device formed by the method
A multi-patterning method includes: patterning at least two first openings in a hard mask layer over a substrate using a first mask; forming spacers within two of the at least two first openings, each spacer having a spacer opening therein for patterning a respective first circuit pattern over the substrate, wherein each spacer defines a pattern-free region adjacent to a respective one of the at least two first circuit patterns, and patterning a second circuit pattern in the hard mask layer using a second mask. The second circuit pattern is located between and excluded from the pattern free regions adjacent the at least two first circuit patterns..
07/10/14
20140193972
Buried hard mask for embedded semiconductor device patterning
Methods and apparatus for manufacturing semiconductor devices, and such semiconductor devices, are described. According to various aspects of the disclosure, a semiconductor device can be manufactured by forming a core region of the semiconductor device and forming a periphery region of the semiconductor device.
07/10/14
20140193957
Reducing gate height variance during semiconductor device formation
In general, aspects of the present invention relate to approaches for forming a semiconductor device such as a fet with reduced gate stack height variance. Specifically, when a gate stack height variance is detected/identified between a set of gate stacks, a hard mask layer and sets of spacers are removed from the uneven gate stacks leaving behind (among other things) a set of dummy gates.
07/10/14
20140191300
Hard mask etch stop for tall fins
A hard mask etch stop is formed on the top surface of tall fins to preserve the fin height and protect the top surface of the fin from damage during etching steps of the transistor fabrication process. In an embodiment, the hard mask etch stop is formed using a dual hard mask system, wherein a hard mask etch stop layer is formed over the surface of a substrate, and a second hard mask layer is used to pattern a fin with a hard mask etch stop layer on the top surface of the fin.
07/10/14
20140190933
Method of manufacturing a magnetoresistive device
A method of manufacturing a magnetoresistive-based device includes a metal hard mask that is inert to a top electrode etch chemistry and that has low sputter yield during a magnetic stack sputter. The metal hard mask is patterned by the photo resist and the photo mask is then stripped and the top electrode (overlying magnetic materials of the magnetoresistive-based device) is patterned by the metal hard mask..
07/03/14
20140187050
Method for isotropic etching
The realization of the intermediate hard mask and the etching of the hard mask made from carbon-doped boron (b:c) being done in said inductive coupling plasma etching reactor (icp).. .
07/03/14
20140187047
Patterning process method for semiconductor devices
A method for forming a semiconductor device that includes a siarc layer formed over a photoresist film which is formed over spacer portions which are formed on a spacer assist layer which is formed over a hard mask layer. The siarc layer has an etch rate substantially similar to the etch rate of the spacer assist layer.
07/03/14
20140187019
Deposit/etch for tapered oxide
A process for fabricating a tapered field plate dielectric for high-voltage semiconductor devices is disclosed. The process may include depositing a thin layer of oxide, depositing a polysilicon hard mask, depositing a resist layer and etching a trench area, performing deep silicon trench etch, and stripping the resist layer.
07/03/14
20140183665
Semiconductor structure and method of fabricating mos device
Provided is a semiconductor structure including a gate structure, a first spacer, and a second spacer. The gate structure is formed on a substrate and includes a gate material layer, a first hard mask layer disposed on the gate material layer, and a second hard mask layer disposed on the first hard mask layer.
07/03/14
20140183657
Embedded polysilicon resistor in integrated circuits formed by a replacement gate process
An embedded resistor structure in an integrated circuit that can be formed in a replacement gate high-k metal gate metal-oxide-semiconductor (mos) technology process flow. The structure is formed by etching a trench into the substrate, either by removing a shallow trench isolation structure or by silicon etch at the desired location.
07/03/14
20140183619
Method for manufacturing semiconductor device using thin hard mask and structure manufactured by the same
A method for manufacturing semiconductor device is disclosed. A substrate with a plurality of protruding strips formed vertically thereon is provided.
06/26/14
20140179077
Method of forming semiconductor device including silicide layers
A method includes forming a gate structure on a semiconductor material region, wherein the gate structure includes spacer elements abutting a gate electrode layer. The gate electrode layer is etched to provide a recess.
06/26/14
20140179076
Manufacturing method of semiconductor device
When forming, over the substrate by the gate-last process, a mosfet of a core region driven by a first power supply voltage and a mosfet of a high-voltage region driven by a second power supply voltage higher than the first power supply voltage, the thickness of the hard mask film formed over a dummy gate film of the high-voltage region is made thicker than that of the hard mask film formed over a dummy gate film of the core region, prior to a process of patterning a dummy gate of the mosfet of the core region and the mosfet of the high-voltage region. Thereby, the breakdown voltage of mosfet of the high-voltage region can be ensured..
06/26/14
20140175617
Oxygen-containing ceramic hard masks and associated wet-cleans
A method of forming an oxygen-containing ceramic hard mask film on a semiconductor substrate involves receiving a semiconductor substrate in a plasma-enhanced chemical vapor deposition (pecvd) process chamber and depositing forming by pevcd on the substrate an oxygen-containing ceramic hard mask film, the film being etch selective to low-k dielectric and copper, resistant to plasma dry-etch and removable by wet-etch. The method may further involve removing the oxygen-containing ceramic hard mask film from the substrate with a wet etch.
06/26/14
20140175610
Electrostatic discharge devices for integrated circuits
A junction diode array for use in protecting integrated circuits from electrostatic discharge can be fabricated to include symmetric and/or asymmetric junction diodes of various sizes. The diodes can be configured to provide low voltage and current discharge via unencapsulated contacts, or high voltage and current discharge via encapsulated contacts.
06/26/14
20140175562
Spacer divot sealing method and semiconductor device incorporating same
A semiconductor structure in fabrication includes a nfet and a pfet. Spacers adjacent gate structures of the nfet and pfet have undesired divots that can lead to substrate damage from chemicals used in a subsequent etch.
06/26/14
20140175369
Manufacturing method of nonvolatile memory device and nonvolatile memory device
A method of manufacturing a non-volatile memory device comprises: forming a first electrode layer; a variable resistance material layer, a second electrode layer; and a hard mask layer, forming a first resist mask extending in a first direction on the hard mask layer; forming a first hard mask extending in the first direction by etching the hard mask layer using the first resist mask; forming a second resist mask extending in a second direction, on the first hard mask such that the width of the second resist mask is greater than the width of the first resist mask; forming a second hard mask by etching the first hard mask using the second resist mask; and forming a variable resistance element by patterning, by etching the second electrode layer, the variable resistance material layer and the first electrode layer using the second hard mask.. .
06/19/14
20140170823
Method for fabricating trench type transistor
A method for fabricating a trench type transistor. An epitaxial layer is provided on a semiconductor substrate.
06/19/14
20140170774
Method for manufacturing a magnetoresistive sensor
A method for manufacturing a magnetic sensor that allows the sensor to be constructed with a very narrow track width and with smooth, well defined side walls. A tri-layer mask structure is deposited over a series of sensor layers.
06/19/14
20140167283
Interconnect structure and fabrication method
A carbon-containing dielectric layer can be formed on a substrate. A protective layer can be formed on the carbon-containing dielectric layer to prevent carbon loss from the carbon-containing dielectric layer by performing a surface treatment to the carbon-containing dielectric layer using a gas at least containing silicon and hydrogen.
06/19/14
20140167182
Ztcr poly resistor in replacement gate flow
An integrated circuit having a replacement gate mos transistor and a polysilicon resistor may be formed by removing a portion at the top surface of the polysilicon layer in the resistor area. A subsequently formed gate etch hard mask includes a mos hard mask segment over a mos sacrificial gate and a resistor hard mask segment over a resistor body.
06/12/14
20140162446
Method for removing hard mask oxide and making gate structure of semiconductor devices
A method includes forming a first gate above a semiconductor substrate, forming a hard mask on the first gate, and forming a contact etch stop layer (cesl) on the hard mask. No hard mask is removed between the step of forming the hard mask and the step of forming the cesl.
06/12/14
20140162380
Pattern improvement in multiprocess patterning
Improved fidelity to an integrated circuit pattern design in a semiconductor structure ultimately produced is achieved by modeling material removal and deposition processes in regard to materials, reactant, feature size, feature density, process parameters and the like as well as the effects of such parameters on etch and material deposition bias due to microloading and rie lag (including inverse rie lag) and using the models to work backward through the intended manufacturing method steps, including hard mask pattern decomposition, to morphologically develop feature patterns for use in most or all process steps which will result in the desired feature sizes and shapes at the completion of the overall process. Modeling of processes may be simplified through use of process assist features to locally adjust rates of material deposition and removal..
06/12/14
20140159197
Self-aligned deep trench capacitor, and method for making the same
A method for forming a trench capacitor includes providing a substrate of a semiconductor material having a hard mask layer; etching the hard mask layer and the substrate to form at least one trench extending into the substrate; and performing pull-back etching on the hard mask layer. In the pull-back etching, a portion of the hard mask layer defining and adjacent to side walls of an opening of the at least one trench is removed.
06/12/14
20140159176
Magnetoresistive element and method of manufacturing the same
According to one embodiment, a magnetoresistive element manufacturing method is provided. In this magnetoresistive element manufacturing method, a first ferromagnetic layer, tunnel barrier layer, and second ferromagnetic layer are sequentially formed on a substrate.
06/12/14
20140159169
Recessing and capping of gate structures with varying metal compositions
A approach for recessing and capping metal gate structures is disclosed. Embodiments include: forming a dummy gate electrode on a substrate; forming a hard mask over the dummy gate electrode; forming spacers on opposite sides of the dummy gate electrode and the hard mask; forming an interlayer dielectric (ild) over the substrate adjacent the spacers; forming a first trench in the ild down to the dummy gate electrode; removing the dummy gate electrode to form a second trench below the first trench; forming a metal gate structure in the first and second trenches; and forming a gate cap over the metal gate structure..
06/05/14
20140154878
Nor flash device manufacturing method
An embodiment of a nor flash device manufacturing method is disclosed, which includes: providing a substrate having a first polycrystalline silicon layer disposed thereon; forming a first hard mask layer on the first polycrystalline silicon layer; etching the first hard mask layer to form a first opening, and cleaning a gas pipeline connected to an etching cavity before etching the first hard mask layer; forming a second hard mask layer on the first hard mask layer, and the second hard mask layer covers the bottom and side wall of the first opening; etching the second hard mask layer to form a second opening, the width of the second opening is smaller than the width of the first opening; etching the first polycrystalline silicon, forming a floating gate. The nor flash device manufacturing method of the present invention improves the yield of the nor flash device..
05/29/14
20140147999
Method of forming gate structure
A method of forming a gate structure includes the steps of: providing a substrate; sequentially forming a polysilicon layer, a hard mask layer, an anti-reflection layer and a photoresist layer over the substrate; etching the hard mask layer using the anti-reflection layer and the photoresist layer as a mask; performing a siconi process to trim the etched hard mask layer until the trimmed hard mask layer has a desired critical dimension; and etching the polysilicon layer to form a gate structure using the trimmed hard mask layer as a mask. The method is capable of precise control of the width and profile of the trimmed hard mask layer and can thereby result in a gate structure with a smaller critical dimension and an improved profile..
05/29/14
20140144873
Plasma etching method
A plasma etching method performs plasma etching on a sample, which has laminated films containing a variable layer of a magnetic film, a barrier layer of an insulating material, and a fixed layer of a magnetic film, using a hard mask, which includes at least one of a ta film and a tin film. The plasma etching method includes a first step of etching the laminated films using n2 gas; and a second step of etching the laminated films after the first step using mixed gas of n2 gas and gas containing carbon elements..
05/29/14
20140144872
Method for manufacturing a magnetic write head using novel mask structure
A method for manufacturing a magnetic write pole of a magnetic write head that achieves improved write pole definition reduced manufacturing cost and improves ease of photoresist mask re-work. The method includes the use of a novel bi-layer hard mask beneath a photoresist mask.
05/22/14
20140138775
Dual epi cmos integration for planar substrates
Silicon germanium regions are formed adjacent gates electrodes over both n-type and p-type regions in an integrated circuit. A hard mask patterned by lithography then protects structures over the p-type region while the silicon germanium is selectively removed from over the n-type region, even under remnants of the hard mask on sidewall spacers on the gate electrode.
05/15/14
20140131776
Fin recess last process for finfet fabrication
A method includes forming isolation regions extending from a top surface of a semiconductor substrate into the semiconductor substrate, and forming a hard mask strip over the isolation regions and a semiconductor strip, wherein the semiconductor strip is between two neighboring ones of the isolation regions. A dummy gate strip is formed over the hard mask strip, wherein a lengthwise direction of the dummy gate strip is perpendicular to a lengthwise direction of the semiconductor strip, and wherein a portion of the dummy gate strip is aligned to a portion of the semiconductor strip.
05/15/14
20140131312
Lithography process using directed self assembly
A method includes forming a patterned hard mask layer, with a trench formed in the patterned hard mask layer. A bulk co-polymer (bcp) coating is dispensed in the trench, wherein the bcp coating includes poly-styrele (ps) and poly methyl metha crylate (pmma).
05/08/14
20140127901
Low-k damage free integration scheme for copper interconnects
A method includes forming a sacrificial layer on a substrate. A hard mask layer is formed on the sacrificial layer.
05/08/14
20140127897
Dual damascene process
A method for forming dual damascene structures in a semiconductor structure is disclosed. The method generally includes etching a substrate using a first hard mask to form a plurality of first trenches and vias, forming a set of first conductive lines and via interconnects, removing the first hard mask, etching the substrate using a second hard mask to form a plurality of second trenches and vias, and forming a set of second conductive lines and via interconnects.
05/08/14
20140127832
Forming method of an annular storage unit of a magneto-resistive memory
The present invention discloses a method of forming an annular storage structure of a magneto-resistive memory. It relates to the manufacturing process of the semiconductor devices.
05/01/14
20140120729
Method for removing a patterned hard mask layer
The present disclosure provides embodiments of a method that includes providing a substrate having a patterned material layer and a patterned hard mask layer disposed on the patterned material layer, wherein the patterned material layer includes a material feature having a first dimension and the patterned hard mask layer includes a hard mask feature covering the material feature. The method also includes forming, on the substrate and the hard mask feature, a patterned resist layer with an opening that exposes the hard mask feature and has a second dimension as a function of the first dimension; etching back the resist film; and removing the patterned hard mask layer..
05/01/14
20140120690
Streamlined process for vertical semiconductor devices
The present disclosure provides a streamlined approach to forming vertically structured devices such as deep trench capacitors. Trenches and a contact plate bridging the trenches are formed using one lithographic process.


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Hard Mask topics: Semiconductor, Semiconductor Device, Etching Process, Ion Implant, Semiconductor Material, Integrated Circuit, Buffer Layer, Conductive Layer, Semiconductor Circuit, Replacement Gate, Silicide Formation, Novolac Resin, Semiconductor Substrate, Patterned Media, Coercivity

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