|| List of recent Aspect Ratio-related patents
|Visually patterned and oriented compositions|
Structured personal care compositions comprising a particle having an aspect ratio of greater than 1.5 are contemplated, as well as methods for using such compositions. The compositions provide a visually distinguishable, oriented pattern that is aesthetically pleasant to provide consumer appeal and product identification..
|Void-free metallic filled high aspect ratio openings|
One embodiment is a device which includes at least one filled via or trench wherein the at least one filled via or trench includes void-free filled metal or alloy, and the filled via or trench has an aspect ratio in a range from 9:1 to about 28:1.. .
|Bounding box gesture recognition on a touch detecting interactive display|
The invention provides a method and apparatus for identifying gestures performed by a user to control an interactive display. The gestures are identified based on a bounding box enclosing the points at which a user contacts a touch sensor corresponding with the display surface.
The preset invention is to provide an air battery including, in an air electrode layer, a needle-shaped carbon material having more reaction starting points of oxygen reduction reaction than conventional carbon materials. Disclosed is an air battery including at least an air electrode, a negative electrode and an electrolyte layer disposed between the air electrode and the negative electrode, wherein the air electrode is provided with at least an air electrode layer, and the air electrode layer contains a needle-shaped carbon material having an average aspect ratio of 10 or more and a dig ratio of 0.1 or more..
|Aircraft with integrated lift and propulsion system|
A vertical take off and landing (vtol) aircraft is designed to be so efficient that it can be commercially competitive with runway dependent aircraft operating in a range of 100 to 1000 miles. Improvements include a high efficiency tilting rotor and wing design that enable both vertical takeoff and efficient high speed cruising, a high aspect ratio wing, and a variable speed propulsion system that is efficient in both hover and cruise flight.
|Mosaic display systems and methods for intelligent media search|
A computer image search system for rapid retrieval of media files images configured to determine a grid width attribute, and a height attribute, a width attribute and an aspect ratio attribute for each media file. The system configured to iteratively process each media file by determining a next media file, an average height and average width of the media files, reconfiguring the media files such that each of the reconfigured media files has the average height and the average width attribute, determining a total image width attribute of the media files by adding the average width attribute for each of the media files, and configured to assign a designated position to a next media file on the grid while the total image width attribute is less than the grid width attribute, and to dynamically display each processed media file at a corresponding designated position on the grid..
|Alkaline secondary battery|
In an alkaline secondary battery including a gelled negative electrode containing zinc alloy powder, an aspect ratio of a particle of the zinc alloy powder is within a range of 2.0-2.4, and the zinc alloy contains 150-350 ppm of bismuth, and 600-1500 ppm of indium.. .
|Composite flame retardant, resin composition and molded article|
The composite flame retardant contains (i) 100 parts by weight of magnesium hydroxide particles (a) having an average thickness of 10 to 100 nm, an average width of 2.4 μm or more and an average aspect ratio of 20 to 120 and (ii) 100 to 900 parts by weight of magnesium hydroxide particles (b) having an average width of 1 μm or less and an average aspect ratio of less than 20.. .
|Integrated microchannel synthesis and separation|
An integrated microchannel reactor and heat exchanger comprising: (a) a waveform sandwiched between opposing shim sheets and mounted to the shim sheets to form a series of microchannels, where each microchannel includes a pair of substantially straight side walls, and a top wall formed by at least one of the opposing shim sheets, and (b) a first set of microchannels in thermal communication with the waveform, where the waveform has an aspect ratio greater than two.. .
|Display apparatus incorporating high-aspect ratio electrical interconnects|
This disclosure provides systems, methods and apparatus for enabling a display to have a faster switching rate and an increased aperture ratio by using looped electrical interconnects with a reduced footprint. In one aspect, a display apparatus includes an array of display elements and a high-aspect ratio electrical interconnect connected to at least one display element in the array of display elements, wherein the high-aspect ratio electrical interconnect forms a loop that defines a closed boundary..
|Image output method and device, and image display|
First and second division patterns are defined so that main areas a and a′ are similar to each other in shape, having the same horizontal-to-vertical ratio. Even if an image output apparatus is connected to a display unit having both first and second display screens, the image output apparatus generates an identical image for the main area a or a′ regardless of the aspect ratio of the display screen.
|Multi-chip led diode apparatus|
In one aspect, there is an apparatus that comprises a plurality of light emitting chips that each have active areas that have elongated aspect ratios. This chips are mounted in a generally rectangular package.
|Abrasive particles having complex shapes and methods of forming same|
An abrasive grain is disclosed and may include a body. The body may define a length (l), a height (h), and a width (w).
|Brush section for an electric toothbrush|
A brush section for use with an electric toothbrush includes a relatively large brush head portion having a generally rectangular shape, although oblong, elliptical and other such shapes having a length to width aspect ration greater than 1 may be employed. The brush head portion is secured to a shaft portion of the brush section that may be configured to couple to a handle section.
|Method and apparatus for displaying screen in electronic device|
A method for displaying a screen of an electronic device is provided. The method includes detecting a first gesture, moving a content according to the first gesture so that part of the content corresponding to a first particular region of the screen is placed at a center of the screen, displaying an aspect ratio scroll in a second particular region of the screen, detecting a second gesture for controlling the aspect ratio scroll, and magnifying or demagnifying the content based on the center of the screen, according to the second gesture..
|Detergent products, methods and manufacture|
A water-soluble pouch suitable for use in machine dishwashing and which comprises a plurality of compartments in generally superposed or superposable relationship, each containing one or more detergent active or auxiliary components, and wherein the pouch has a volume of from about 5 to about 70 ml and a longitudinal/transverse aspect ratio in the range from about 2:1 to about 1:8, preferably from about 1:1 to about 1:4. The water-soluble pouch allows for optimum delivery of dishwashing detergent.
|Fluid stream imaging apparatus|
A fluid stream imaging apparatus having either optics for manipulating the aspect ratio or sensing elements configured for manipulating the aspect ratio of an image of the fluid stream. This application may also relate to a system for acquiring images of a portion of a fluid stream at high speeds for image processing to measure and predict droplet delays for individual forming particles..
|Sequential atomic layer deposition of electrodes and resistive switching components|
Provided are methods of forming nonvolatile memory elements using atomic layer deposition techniques, in which at least two different layers of a memory element are deposited sequentially and without breaking vacuum in a deposition chamber. This approach may be used to prevent oxidation of various materials used for electrodes without a need for separate oxygen barrier layers.
|Resin composition for heat dissipation and heat dissipating substrate manufactured by using the same|
Disclosed herein are a resin composition for heat dissipation, including: an insulating material; a first filler added to the insulating material and having a plate shaped carbon material; and a second filler added to the insulating material, and having a carbon material having a higher aspect ratio than the first filler.. .
|Disk and process for producing base material for disk, and disk roll|
The present invention relates to a process for producing a base material for disks of disk rolls, in which the disk roll contains a rotating shaft and a plurality of the disks fitted on the rotating shaft by insertion whereby the outer peripheral surface of the disks serves as a conveying surface, in which the process contains molding a slurry raw material containing inorganic fibers, an inorganic filler having an aspect ratio of from 1 to 25 and an inorganic binder into a plate shape; and drying the molded plate.. .
|Screen control module of a mobile electronic device and controller thereof|
A screen control module of a mobile electronic device has at least one controller formed on a circuit board. The circuit board has multiple solder pads formed on the circuit board and respectively aligning along a first direction and a second direction.
|Conductive metal composition|
A conductive metal composition comprising 40 to 88 wt % of silver particles having an average particle size in the range of 10 to 100 nm and having an aspect ratio of 3 to 1:1, 2 to 20 wt % of a poly(2-ethyl-2-oxazoline) resin having a weight-average molar mass of 50,000 to 500,000 and 10 to 58 wt % of a solvent for the poly(2-ethyl-2-oxazoline) resin.. .
|User interface for augmented reality enabled devices|
Method and apparatus for displaying augmented reality contents are disclosed. The method may include controlling a camera to scan an environment in view of a user, identifying a set of surfaces in the environment for displaying user interface windows according to characteristics of the environment, prioritizing a set of augmented reality contents for display with respect to the set of surfaces in the environment, and displaying the set of augmented reality contents on the set of surfaces in a display.
|Stacked via structure for metal fuse applications|
A back end of the line (beol) fuse structure having a stack of vias. The stacking of vias leads to high aspect ratios making liner and seed coverage inside the vias poorer.
|Etch process with pre-etch transient conditioning|
A method for etching features with different aspect ratios in an etch layer is provided. A plurality of cycles is provided wherein each cycle comprises a pre-etch transient conditioning of the etch layer, which provides a transient condition of the etch layer, wherein the transient condition has a duration and etching the etch layer for a duration, wherein the duration of the etching with respect to the duration of the transient condition is controlled to control etch aspect ratio dependence..
|Semiconductor device and method for fabricating the same|
A semiconductor device that may prevent an unexposed substrate and generation of bowing profile during a process for forming an open region having a high aspect ratio, and a method for fabricating the semiconductor device. The semiconductor device includes a first material layer formed over a substrate, an open region formed in the first material layer that exposes the first material layer, a second material layer formed on sidewalls of the open region, wherein the second material layer is a compound material including an element of the first material layer, and a conductive layer formed inside the open region..
|Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnects|
Provided are methods of void-free tungsten fill of high aspect ratio features. According to various embodiments, the methods involve a reduced temperature chemical vapor deposition (cvd) process to fill the features with tungsten.
|Electrostatic image developer|
An electrostatic image developer having little change in charge amount, no generation of fog and excellent environmental stability under all of low temperature and low humidity environment, normal temperature and normal humidity environment, and high temperature and high humidity environment is provided. Disclosed is an electrostatic image developer comprising a colored resin particle containing a binder resin and a colorant, and an external additive, wherein the external additive contains an alumina fine particle in plate-like shape subjected to a hydrophobicity-imparting treatment having a number average primary particle diameter of 20 to 120 nm and an aspect ratio of 3 to 15, and a content of the alumina fine particle is in the range from 0.05 to 1 part by mass with respect to 100 parts by mass of the colored resin particle..
|Compact integrated-drive pumps|
Pump assemblies are disclosed that have a magnetically driven pump-head subassembly and a pump-driver subassembly coupled thereto, wherein the pump-driver subassembly includes a pump-driver enclosure. The pump-head subassembly comprises a rotatable magnet contained in a magnet cup extending into the pump-driver enclosure.
|High aspect ratio daylight collectors|
Lighting devices and methods for providing daylight to the interior of a structure are disclosed. Some embodiments disclosed herein provide a daylighting device including a tube having a sidewall with a reflective interior surface, a light collecting structure, and a light reflector positioned to reflect daylight into the light collector.
|Camera viewfinder comprising a projector|
A viewfinder is described that is constructed using a projection system contained within the viewfinder housing. The projection system enables the viewfinder to offer a selectable display resolution and configurable aspect ratio.
|Wrap-around trench contact structure and methods of fabrication|
A wrap-around source/drain trench contact structure is described. A plurality of semiconductor fins extend from a semiconductor substrate.
|Vacuum insulated glass (vig) unit including nano-composite pillars, and/or methods of making the same|
Certain example embodiments of this invention relate to composite pillar arrangements for vig units that include both harder and softer materials. The softer materials are located on the outside or extremities of the central, harder pillar material.
|Fiber optic cables allowing fiber translation to reduce bend attenuation|
A cable includes a channel with an aspect ratio that houses optical fibers therein. The cable includes first and second stranded conductors on opposing sides of the channel.
|Method and apparatus for reframing and encoding a video signal|
Reframing is used to re-size an image or video content, e.g. For displaying video signals with a given aspect ratio on a display having a different aspect ratio.
|Moems apparatus and a method for manufacturing same|
An apparatus is formed from a double active layer silicon on insulator (dsoi) substrate that includes first and second active layers separated by an insulating layer. An electrostatic comb drive is formed from the substrate to include a first comb formed from the first active layer and a second comb formed from the second active layer.
|Image pickup apparatus with inclination guide display|
An image pickup apparatus is disclosed which provides an appropriate inclination guide display in accordance with an aspect ratio of a picked-up image and the like. The image pickup apparatus includes an inclination detector which detects an inclination of the image pickup apparatus, a display device capable of superimposedly showing an inclination guide display corresponding to a detection output from the inclination detector, on a picked-up image, and an aspect ratio setter which sets the aspect ratio of a picked-up image.
|Systems and methods for clustering particles by liquid-phase electric plasma discharge|
The disclosed technology includes systems and methods for clustering particles, especially water contaminants, by liquid-phase electric plasma discharge. According to certain implementations, the discharge may be applied continuously, and may be of relatively low power, e.g., a voltage between 300 v and 5000 v and an amperage between 0.1 a and 1 a.
|Layered product for fine pattern formation and method of manufacturing layered product for fine pattern formation|
Disclosed is a layered product for fine pattern formation and a method of manufacturing the layered product for fine pattern formation, capable of easily forming a fine pattern having a thin or no remaining film in order to form a fine pattern having a high aspect ratio on a processing object. The layered product for fine pattern formation (1) of the present invention used to form a fine pattern (220) in a processing object (200) using a first mask layer (103) includes: a mold (101) having a concavo-convex structure (101a) on a surface; and a second mask layer (102) provided on the concavo-convex structure (101a), wherein in the second mask layer (102), a distance (lcc) and a height (h) of the concavo-convex structure (101a) satisfy formula (1) 0<lcc<1.0 h, and a distance (lcv) and the height (h) satisfy formula (2) 0≦lcv≦0.05 h..
|Structured placement of latches/flip-flops to minimize clock power in high-performance designs|
A latch placement tool determines a shape for a cluster of latches from a preliminary layout (or based on a netlist), including an aspect ratio of the shape, and generates a template for placement of the latches in conformity with the shape. Latches are placed around a local clock buffer (lcb) based on latch size, from largest latch first to smallest latch last, and based on their ideal locations given the target aspect ratio.
|Method and apparatus continuing action of user gestures performed upon a touch sensitive interactive display in simulation of inertia|
A method and apparatus for identifying user gestures to control an interactive display identifies gestures based on a bounding box enclosing points at which a user contacts a touch sensor corresponding with the display surface and permits use of inexpensive and highly reliable grid-based touch sensors that provide a bounding box to describe contact information. In identifying gestures, position, motion, shape, and deformation of the bounding box may be considered.
|High density storage applicance|
A high-density storage appliance comprises a printed circuit board (pcb) to which a plurality of solid state drives (ssds) are coupled. Each of the ssds has a connector positioned along a width of the ssd, which is shorter than a height of the ssd.
|Integration of chips and silicon-based trench capacitors using low parasitic silicon-level connections|
Methods and apparatuses are described for integration of integrated circuit die and silicon-based trench capacitors using silicon-level connections to reduce connection lengths, parasitics and necessary capacitance magnitudes and volumes. A trench capacitor can be fabricated on silicon and mounted on or embedded in a chip or one or more sides of a through silicon interposer (tsi) for silicon-level connections to chip circuitry.
|Adhesive metal nitride on glass and related methods|
This disclosure provides systems, methods and apparatus for an adhesive metal nitride layer on glass. In one aspect, a glass substrate having a surface is provided.
|Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures|
Embodiments of the invention generally relate to a method of cleaning a substrate and a substrate processing apparatus that is configured to perform the method of cleaning the substrate. More specifically, embodiments of the present invention relate to a method of cleaning a substrate in a manner that reduces or eliminates the negative effects of line stiction between semiconductor device features.
|Method and apparatus for processing a video signal for display|
A method and apparatus for processing a video signal is provided. The method and apparatus comprises a consolidator configured to consolidate a plurality of unutilized regions based on a determination of a difference between an aspect ratio of a display being generated and an aspect ratio of first content to form a consolidated display region.
|Pixel, display device including the same, and driving method thereof|
A display device including a display unit having a plurality of pixels is disclosed. In one aspect, at least one first pixel among the pixels includes: a first compensation capacitor including one electrode connected to a data line and the other electrode connected to a first node; a first switching transistor including a gate electrode configured to have a scan signal, one electrode connected to the first node, and the other electrode connected to a second node; a first driving transistor including a gate electrode connected to the second node, one electrode connected to a first power source voltage, and the other electrode connected to a first organic light emitting diode (oled); and a first link transistor including a gate electrode configured to have a link control signal, one electrode connected to the data line, and the other electrode connected to the first power source voltage.
|Collimators for scan of radiation sources and methods of scanning|
Collimators for two-dimensional scans of a radiation sources and methods of scanning are provided. One system includes a scan unit for scanning and collecting ionizing radiation emitted from a radiation emitting object is provided.
|Transparent electrode comprising electrode line of high-viscosity conductive nano ink composition and touch sensor, transparent heater and electromagnetic wave shielding material using the transparent electrode|
Provided herein is a transparent electrode comprising: a substrate; and an electrode pattern where a plurality of electrode lines are patterned in a mesh format on the substrate, wherein the width each electrode line is in the range of 0.1 to 15 μm, and the aspect ratio of each electrode line is in the range of 1:0.1 to 1:1, and each electrode line is made of a conductive nano structure, and a high viscosity conductive nano ink composition comprising a high molecular compound having a molecular weight between 50,000 and 1,000,000.. .
|Dry etch process|
A method for conformal dry etch of a liner material in a high aspect ratio trench is achieved by depositing or forming an inhomogeneous passivation layer which is thicker near the opening of a trench bat thinner deep within the trench. The methods described herein use a selective etch following formation of the inhomogeneous passivation layer.
|Conformal film deposition for gapfill|
A method and apparatus for conformally depositing a dielectric oxide in high aspect ratio gaps in a substrate is disclosed. A substrate is provided with one or more gaps into a reaction chamber where each gap has a depth to width aspect ratio of greater than about 5:1.
|Nanopillar field-effect and junction transistors|
Methods for fabrication of nanopillar field effect transistors are described. These transistors can have high height-to-width aspect ratios and be cmos compatible.
|Skin care compositions containing cotton and citrus-derived materials|
The compositions and methods of this invention relate to skin care compositions containing: (a) hydrophobic and hydrophilic, linear cellulose particles having an average length of from about 1 to about 1000 μm, a particle aspect ratio from about 1000 to about 2 and a thickness of from about 1 to about 500 μm; (b) amphiphilic linear cellulose particles derived from sources selected from the following group: citrus pulp, sugar beet pulp, banana pulp, mango pulp, apple pulp, passion fruit pulp and tomato pulp and the like, said particles having an average size of from about 1 to about 1000 μm, a particle aspect ratio from about 1000 to about 2 and a thickness of from about 1 to about 500 μm; wherein the ratio of ingredient (b) to ingredient (a) is from about 1:10 to about 10:1; and a cosmetically acceptable carrier.. .
|Rinse-off skin care compositions containing cellulosic materials|
The compositions and methods of this invention relate to a rinse-off skin care composition containing hydrophobic, linear cellulose particles having an average length of from about 1 to about 1000 μm, a particle aspect ratio from about 1000 to about 2 and a thickness of from about 1 to about 500 μm; at least one cleansing agent selected from the group consisting of a saponified fat and a surfactant; and a cosmetically acceptable carrier.. .
|Leave-on compositions containing cellulose materials|
The compositions and methods of this invention relate to a leave-on skin care composition containing hydrophobic, linear cellulose particles having an average length of from about 1 to about 500 μm, a particle aspect ratio from about 2 to about 25 and an average thickness of from about 1 to about 500 μm; and a cosmetically acceptable carrier.. .
The resin composition comprises (i) 100 parts by weight of a resin (component a), (ii) plate-like magnesium hydroxide having a crystal thickness (y) of 0.2 μm or less and an aspect ratio of 20 to 100 (component b) and (iii) needle-like basic magnesium sulfate (component c), wherein the total content of the components b and c is 1 to 100 parts by weight based on 100 parts by weight of the resin, and the weight ratio of the component b to the component c is 0.1 to 0.9:0.9 to 0.1.. .
|Negative electrode for rechargeable lithium battery and rechargeable lithium battery including same|
A negative electrode for a rechargeable lithium battery includes a current collector and a negative active material layer including a negative active material on the current collector. A rechargeable lithium battery includes the negative electrode.
|High aspect ratio polymer elongate and one-dimensional micro structure fabrication|
A preferred method of the invention introduces organosilicon polymer into the reservoir of a mold with trenches defining a negative mold impression of a feature that has a high aspect ratio in fluid communication with the micro-dimensioned reservoir. The mold is preferably coated with a low-stiction coating.
|Display device and method of operating the same|
A display device is provided which includes a display panel including a plurality of pixels connected with a plurality of gate lines and a plurality of data lines; a gate driving unit configured to drive the plurality of gate lines; a data driver configured to drive the plurality of data lines; and a timing controller configured to generate a plurality of control signals for controlling the gate driving unit and the data driver in response to externally provided clock signal and data signals. The timing controller converts the data signals into an image data signal, a horizontal synchronization signal, a vertical synchronization signal, and a data enable signal, a pulse width of each of the horizontal and vertical synchronization signals corresponding to an aspect ratio of the data signals or a size of a black image display area.
|Cvd-free, scalable processes for the production of silicon micro- and nanostructures|
Manufacturing-friendly and scalable methods for the production of silicon micro- and nanostructures, including silicon nanotubes, are described. The inventive methods utilize conventional integrated circuit and mems manufacturing processes, including spin-coating, photolithography, wet and dry silicon etching, and photoassisted electrochemical etch processes.
|High-aspect ratio screen printable thick film paste compositions containing wax thixotropes|
Provided are high-aspect ratio printable thick film metal paste compositions that can be deposited onto a substrate using, for example, screening printing techniques; and methods of preparing and using thick film printable metal pastes; and methods of screen printing of the thick film metal paste compositions onto a substrate to produce printed circuits, conductive lines or features on the substrate and/or a conductive surface on a solar cell device. Also provided are printed substrates containing an electronic feature produced by the high-aspect ratio printable thick film metal paste compositions..
|Coated fibrous copper microparticles, and electrically conductive coating agent and electrically conductive film each containing said coated fibrous copper microparticles|
The present invention provides coated fibrous copper microparticles, wherein the coated fibrous copper microparticles are fibrous copper microparticles each at least partially coated with a metal other than copper, and the length and the aspect ratio of the fibrous copper microparticles are 1 μm or more and 10 or more, respectively.. .
|Super-hydrophobic hierarchical structures, method of forming them and medical devices incorporating them|
Synthetic polymer substrates comprising a hierarchical surface structure of multiple domes and multiple pillars on said domes, wherein said substrate is a synthetic polymer film, said domes have diameters in the range from about 5 μm to about 400 μm, heights in the range from about 2.5 μm and about 500 μm, and said pillars have diameters in the range from about 20 nm to about 5 μm and aspect ratios of from about 2 to about 50, and methods of making and using them.. .
|Fluoropolymer articles having a high surface roughness and high coarseness|
The present invention furthermore relates to a membrane comprising, or consisting of, a fluoropolymer having a coarseness index ρ/ebp of at least 0.3, an air permeability of 15 ft3/ft2/min or higher and a node aspect ratio of below 25.. .
|Corticosteroid particles and method of production|
A new particle morphology of glucocorticosteroids is described. The forms have a particle morphology that is particularly well suited for use in an inhaled corticosteroid drug suspension formulation for delivery from a next generation nebulizer device.
|Smart targets facilitating the capture of contiguous images|
Systems and methods facilitating the capture of contiguous images suitable for composition into a wide-angle or panoramic image. The method may include displaying smart graphical targets on an image capture graphical user interface representing target focal points to direct a camera to in order capture images with sufficient continuity or overlap for panorama creation.
|Process and material for preventing deleterious expansion of high aspect ratio copper filled through silicon vias (tsvs)|
Techniques are disclosed for forming through-silicon vias (tsvs) implementing a negative thermal expansion (nte) material such as zirconium tungstate (zrw2o8) or hafnium tungstate (hfw2o8). In some cases, the nte material is disposed between the substrate and conductive core material of the tsv and serves to offset, at least in part, the coefficient of thermal expansion (cte) mismatch there between, thus reducing heat-induced stresses and/or protrusion (pumping) of the conductive core material.
A cushioning assembly includes a first sheet and a second sheet opposing the first sheet. A plurality of foam elements are between the first and second sheets and adhered to at least one of the first sheet interior surface and the second sheet interior surface.
|Bulk-size nanostructured materials and methods for making the same by sintering nanowires|
Thermoelectric solid material and method thereof. The thermoelectric solid material includes a plurality of nanowires.
|Low profile magnetic filter|
A plasma processing apparatus includes a processing chamber having a plasma processing space therein and a substrate support in the processing chamber at a first end for supporting a substrate. A plasma source is coupled into the processing space and configured to form a plasma at a second end of the processing chamber opposite said first end.
|System for directly measuring the depth of a high aspect ratio etched feature on a wafer|
A system (10) for directly measuring the depth of a high aspect ratio etched feature on a wafer (80) that includes an etched surface (82) and a non-etched surface (84). The system (10) utilizes an infrared reflectometer (12) that in a preferred embodiment includes a swept laser (14), a fiber circulator (16), a photodetector (22) and a combination collimator (18) and an objective lens (20).